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ASMC 2000 proceedings. 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : advancing the science of semiconductor manufacturing excellence : September 12-14, 2000, Boston, Massachusetts, USA / [co-sponsored by: Semiconductor Equipment and Materials International (SEMI), Institute of Electrical and Electronics Engineers, Inc. (IEEE)].
Connect to full text Available online
View online- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (11th : 2000 : Boston, Mass.)
- Language:
- English
- Subjects (All):
- Semiconductor industry--Congresses.
- Semiconductor industry.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Process control--Congresses.
- Process control.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- vi pages, vii-x unnumbered pages, 480 pages : illustrations
- Other Title:
- 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
- Advancing the science of semiconductor manufacturing excellence
- Advanced Semiconductor Manufacturing Conference and Workshop
- Place of Publication:
- Piscataway, N.J. : IEEE ; Mountain View, Calif. : SEMI, [2000]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE Catalog Number 00CH37072"--T.p. verso.
- Includes bibliographical references.
- ISBN:
- 0780359216
- 9780780359215
- 0780359232
- 9780780359239
- OCLC:
- 45707543
- Access Restriction:
- Restricted for use by site license.
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