2 options
Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems. MEMS 2000 : Miyazaki, Japan, January 23-27, 2000 / sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE International Conference on Micro Electro Mechanical Systems (13th : 2000 : Miyazaki, Japan)
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xlv, 810 pages : illustrations
- Other Title:
- Thirteenth annual International Conference on Micro Electro Mechanical systems
- MEMS 2000
- 2000 IEEE Micro Electro Mechanical Systems
- Micro Electro Mechanical Systems
- Place of Publication:
- Piscataway N.J. : Institute of Electrical and Electronics Engineers, [2000]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Includes bibliographical references and index.
- "IEEE Catalog Number: 00CH36308."
- ISBN:
- 0780352734
- 9780780352735
- 0780352742
- 9780780352742
- 0780352750
- 9780780352759
- OCLC:
- 43980162
- Access Restriction:
- Restricted for use by site license.
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.