2 options
MEMS '99 : Twelfth IEEE International Conference on Micro Electro Mechanical Systems. technical digest : Orlando, Florida, USA, January 17-21, 1999 / sponsored by the IEEE Robotics and Automation Society.
Connect to full text Available online
View online- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE Workshop on Micro Electro Mechanical Systems (12th : 1999 : Orlando, Fla.)
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Detectors--Congresses.
- Detectors.
- Actuators--Congresses.
- Actuators.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xxxvi, 660 pages : illustrations
- Other Title:
- IEEE International Conference on Micro Electro Mechanical Systems
- Micro Electro Mechanical Systems
- Micro Electro Mechanical Systems, 1999, MEMS '99, Twelfth IEEE International Conference on.
- Place of Publication:
- Piscataway, NJ : IEEE, [1999]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE Catalog Number 99CH36291"--T.p. verso.
- Includes index and bibliographic references.
- ISBN:
- 0780351940
- 9780780351943
- 0780351959
- 9780780351950
- 0780351967
- 9780780351967
- OCLC:
- 40821462
- Access Restriction:
- Restricted for use by site license.
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.