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1997 IEEE International Symposium on Semiconductor Manufacturing. conference proceedings : October 6-8, 1997, San Francisco, California.
- Format:
- Book
- Conference/Event
- Conference Name:
- International Symposium on Semiconductor Manufacturing (1997 : San Francisco, Calif.)
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 volume (various pagings) : illustrations
- Other Title:
- Semiconductor manufacturing
- Place of Publication:
- Piscataway, N.J. : IEEE, [1997]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Includes bibliographical references and indexes.
- ISBN:
- 0780337522
- 9780780337527
- 0780337530
- 9780780337534
- 0780337549
- 9780780337541
- OCLC:
- 39142072
- Access Restriction:
- Restricted for use by site license.
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