1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. theme, the Quest for semiconductor manufacturing excellence : leading the charge into the 21st century : ASMC 97 proceedings, September 10-12, 1997, Cambridge, Massachusetts.

Format:

Book

Conference/Event

Contributor:

IEEE Xplore (Online service)

Institute of Electrical and Electronics Engineers.

Semiconductor Equipment and Materials International.

Conference Name:

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (8th : 1997 : Cambridge, Mass.)

Language:

English

Subjects (All):

Semiconductor industry--Congresses.

Semiconductor industry.

Semiconductors--Design and construction--Congresses.

Semiconductors.

Semiconductors--Design and construction.

Process control--Congresses.

Process control.

Genre:

Conference papers and proceedings.

Physical Description:

vi, 460 pages : illustrations

Other Title:

Quest for semiconductor manufacturing excellence, leading the charge into the 21st century

ASMC 97

1997 Advanced Semiconductor Manufacturing Conference and Workshop

Advanced Semiconductor Manufacturing Conference and Workshop, 1997, IEEE/SEMI.

Place of Publication:

[New York] : [Institute of Electrical and Electronics Engineers] ; [Piscataway, NJ]: [IEEE Service Center [distributor], [1997]

System Details:

Mode of access: World Wide Web.

text file

Summary:

The ASMC '97 proceedings contain premier papers on the latest advances in semiconductor manufacturing for IC manufacturing professionals. The number of papers presented has been on the incline over the past five years.

Notes:

"IEEE catalog number 97CH36089"--T.p. verso.

Includes bibliographical references.

ISBN:

0780340507

9780780340503

0780340515

9780780340510

0780340523

9780780340527

OCLC:

37830937

Access Restriction:

Restricted for use by site license.