2 options
Ion implantation technology--96. proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996 / editors Emi Ishidida ... [and others].
- Format:
- Book
- Conference/Event
- Conference Name:
- International Conference on Ion Implantation Technology (11th : 1996 : Austin, Tex.)
- Language:
- English
- Subjects (All):
- Semiconductors--Congresses.
- Semiconductors.
- Ion implantation--Congresses.
- Ion implantation.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xxvii, 832 pages : illustrations
- Place of Publication:
- Piscataway, N.J. : Institute of Electrical and Electronics Engineers, [1996]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Includes bibliographical references and index.
- "96TH8182"--Cover.
- ISBN:
- 078033289X
- 9780780332898
- OCLC:
- 37331438
- Access Restriction:
- Restricted for use by site license.
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