IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 96 proceedings : theme, Innovative approaches to growth in the semiconductor industry, November 12-14, 1996, Cambridge, Massachusetts / [sponsored jointly by Semiconductor Equipment and Materials International (SEMI) and the Institute of Electrical and Electronics Engineers (IEEE)].

Format:

Book

Conference/Event

Contributor:

IEEE Xplore (Online service)

Semiconductor Equipment and Materials International.

Institute of Electrical and Electronics Engineers.

Conference Name:

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (7th : 1996 : Cambridge, Mass.)

Language:

English

Subjects (All):

Semiconductor industry--Congresses.

Semiconductor industry.

Semiconductors--Design and construction--Congresses.

Semiconductors.

Semiconductors--Design and construction.

Process control--Congresses.

Process control.

Genre:

Conference papers and proceedings.

Physical Description:

vi, 479 pages : illustrations

Other Title:

1996 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Innovative approaches to growth in the semiconductor industry

1996 Proceedings, IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)

ASMC 96

1996 Advanced Semiconductor Manufacturing Conference and Workshop

Advanced Semiconductor Manufacturing Conference and Workshop, 1996, ASMC 96 proceedings, IEEE/SEMI 1996.

Place of Publication:

[New York, N.Y.] : Institute of Electrical and Electronics Engineers ; Mountain View, Calif. : SEMI, [1996]

System Details:

Mode of access: World Wide Web.

text file

Notes:

"IEEE catalog number 96CH35953"--T.p. verso.

Includes bibliographical references.

ISBN:

0780333721

9780780333727

0780333713

9780780333710

078033373X

9780780333734

OCLC:

36153789

Access Restriction:

Restricted for use by site license.