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IEEE/SEMI 1994 Advanced Semiconductor Manufacturing Conference and Workshop. theme, Manufacturing excellence : a global challenge : ASMC '94 proceedings, November 14-16, 1994, Cambridge, Massachusetts.

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Format:
Book
Conference/Event
Contributor:
IEEE Xplore (Online service)
Institute of Electrical and Electronics Engineers.
Semiconductor Equipment and Materials International.
Conference Name:
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (5th : 1994 : Cambridge, Mass.)
Language:
English
Subjects (All):
Semiconductors--Design and construction--Congresses.
Semiconductors.
Semiconductors--Design and construction.
Production management--Congresses.
Production management.
Process control--Congresses.
Process control.
Genre:
Conference papers and proceedings.
Physical Description:
vi, 335 pages : illustrations
Other Title:
1994 Advanced Semiconductor Manufacturing Conference and Workshop
Manufacturing excellence, a global challenge
Place of Publication:
New York : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center [distributor], [1994]
System Details:
Mode of access: World Wide Web.
text file
Notes:
Includes bibliographical references.
"IEEE catalog number 94CH34751"--T.p. verso.
ISBN:
0780320530
9780780320536
0780320549
9780780320543
0780320557
9780780320550
OCLC:
32248573
Access Restriction:
Restricted for use by site license.

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