IEEE micro electro mechanical systems. an investigations of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.

Format:

Book

Conference/Event

Contributor:

IEEE Xplore (Online service)

IEEE Robotics and Automation Society.

American Society of Mechanical Engineers. Dynamic Systems and Control Division.

Micromachine Center (Japan)

Conference Name:

IEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan)

Language:

English

Subjects (All):

Electromechanical devices--Congresses.

Electromechanical devices.

Microelectronics--Congresses.

Microelectronics.

Detectors--Congresses.

Detectors.

Actuators--Congresses.

Actuators.

Genre:

Conference papers and proceedings.

Physical Description:

xiv, 360 pages : illustrations

Other Title:

IEEE Micro Electro Mechanical Systems Workshop

Also known as: MEMS '94

Micro electro mechanical systems

Micro Electro Mechanical Systems, 1994, MEMS '94, proceedings, IEEE Workshop on.

Place of Publication:

[New York] : [Institute of Electrical and Electronics Engineers], 1994.

System Details:

Mode of access: World Wide Web.

text file

Notes:

"IEEE Workshop on Micro Electro Mechanical Systems"--P. iii.

"IEEE catalog number 94CH3404-1."

Includes bibliographical references and index.

ISBN:

078031834X

9780780318342

0780318331

9780780318335

0780318358

9780780318359

OCLC:

31818292

Access Restriction:

Restricted for use by site license.