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IEEE/SEMI International Semiconductor Manufacturing Science Symposium [ISMSS]. San Francisco Marriott Hotel, San Francisco, California; conference July 19-20, workshops July 18 & 21 [1993]; held in conjunction with SEMICON/West 93 July 20-22 / Sponsored by Semiconductor Equipment and Materials International ... [and others].
- Format:
- Book
- Conference/Event
- Conference Name:
- International Semiconductor Manufacturing Science Symposium (5th : 1993 : San Francisco, Calif.)
- Language:
- English
- Subjects (All):
- Electronic industries--Congresses.
- Electronic industries.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Computer integrated manufacturing systems--Congresses.
- Computer integrated manufacturing systems.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 151 pages : illustrations
- Other Title:
- ISMSS 93 Proceedings
- Semiconductor Manufacturing Science Symposium, 1993, ISMSS 1993, IEEE/SEMI International.
- Place of Publication:
- Piscataway, NJ : Institute of Electrical and Electronics Engineers, [1993]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE catalog number 93CH3280-5"--T.p. verso.
- ISBN:
- 0780312120
- 9780780312128
- OCLC:
- 29717866
- Access Restriction:
- Restricted for use by site license.
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