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Micro electro mechanical systems. an investigation of micro structures, sensors, actuators, machines, and systems : proceedings : IEEE, Fort Lauderdale, Florida, February 7-10, 1993 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.)
- Language:
- English
- Subjects (All):
- Electromechanical devices--Congresses.
- Electromechanical devices.
- Microelectronics--Congresses.
- Microelectronics.
- Detectors--Congresses.
- Detectors.
- Actuators--Congresses.
- Actuators.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xvii, 294 pages : illustrations
- Other Title:
- IEEE Micro Electro Mechanical Systems Workshop
- Also known as: MEMS '93
- Micro Electro Mechanical Systems, 1993, MEMS '93, proceedings "An investigation of micro structures, sensors, actuators, machines and systems", IEEE.
- Place of Publication:
- [New York] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center, [1993]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "1993 IEEE Workshop on Micro Electro Mechanical Systems"--P. iii.
- "IEEE catalog number 93CH3265-6."
- Includes bibliographical references and index.
- ISBN:
- 078030957X
- 9780780309579
- 0780309588
- 9780780309586
- 0780309596
- 9780780309593
- OCLC:
- 27919417
- Access Restriction:
- Restricted for use by site license.
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