Micro electro mechanical systems. an investigation of micro structures, sensors, actuators, machines, and systems : proceedings : IEEE, Fort Lauderdale, Florida, February 7-10, 1993 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.

Format:

Book

Conference/Event

Contributor:

IEEE Xplore (Online service)

IEEE Robotics and Automation Society.

American Society of Mechanical Engineers. Dynamic Systems and Control Division.

Conference Name:

IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.)

Language:

English

Subjects (All):

Electromechanical devices--Congresses.

Electromechanical devices.

Microelectronics--Congresses.

Microelectronics.

Detectors--Congresses.

Detectors.

Actuators--Congresses.

Actuators.

Genre:

Conference papers and proceedings.

Physical Description:

xvii, 294 pages : illustrations

Other Title:

IEEE Micro Electro Mechanical Systems Workshop

Also known as: MEMS '93

Micro Electro Mechanical Systems, 1993, MEMS '93, proceedings "An investigation of micro structures, sensors, actuators, machines and systems", IEEE.

Place of Publication:

[New York] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center, [1993]

System Details:

Mode of access: World Wide Web.

text file

Notes:

"1993 IEEE Workshop on Micro Electro Mechanical Systems"--P. iii.

"IEEE catalog number 93CH3265-6."

Includes bibliographical references and index.

ISBN:

078030957X

9780780309579

0780309588

9780780309586

0780309596

9780780309593

OCLC:

27919417

Access Restriction:

Restricted for use by site license.