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IEEE/SEMI International Semiconductor Manufacturing Science Symposium. May 19-22, 1991, Burlingame, CA, USA.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE/SEMI International Semiconductor Manufacturing Science Symposium (3rd : 1991 : Burlingame, Calif.)
- Language:
- English
- Subjects (All):
- Electronic industries--Congresses.
- Electronic industries.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Computer integrated manufacturing systems--Congresses.
- Computer integrated manufacturing systems.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- x, 164 pages : illustrations
- Other Title:
- Also known as: ISMSS 1991
- Semiconductor Manufacturing Science Symposium, 1991, ISMSS 1991, IEEE/SEMI International.
- Place of Publication:
- New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers ; Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, [1991]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE catalog number 91CH2993-4"--T.p. verso.
- Sponsored by Semiconductor Equipment and Materials International, IEEE Electrons Devices Society, and IEEE Components, Hybrids, & Manufacturing Technology Society.
- Includes bibliographical references.
- ISBN:
- 0780300270
- 9780780300279
- 0780300289
- 9780780300286
- 0780300297
- 9780780300293
- OCLC:
- 24234317
- Access Restriction:
- Restricted for use by site license.
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