IEEE Solid-State Sensor and Actuator Workshop. technical digest : 1990, Hilton Head Island, South Carolina, June 4-7 / sponsored by the IEEE Electron Devices Society.

Format:

Book

Conference/Event

Contributor:

Hocker, G. Benjamin.

IEEE Xplore (Online service)

IEEE Electron Devices Society.

Conference Name:

IEEE Solid-State Sensor and Actuator Workshop (4th : 1990 : Hilton Head Island, S.C.)

Language:

English

Subjects (All):

Solid state electronics--Congresses.

Solid state electronics.

Detectors--Congresses.

Detectors.

Actuators--Congresses.

Actuators.

Transducers--Congresses.

Transducers.

Genre:

Conference papers and proceedings.

Physical Description:

v, 191 pages : illustrations

Other Title:

Solid-State Sensor and Actuator Workshop, 1990, 4th technical digest, IEEE.

Place of Publication:

[New York, N.Y.] (3345 E. 47th St., New York 10017) : [IEEE], [1990]

System Details:

Mode of access: World Wide Web.

text file

Contents:

Session 1, Acoustic and resonant devices

sess. 2, Microactuators 1

sess. 3, CAD

sess. 4, Chemistry and physics of materials and processes

sess. 5, Integrated sensor systems; magnetic sensors

sess. 6, Fabrication methods, structures, and materials

sess. 7, Microactuators 2

sess. 8, Accelerometers and flow sensors

sess. 9, Chemical and biological sensors

sess. 10, Pressure sensors.

Notes:

Cover title.

Papers presented at the 4th workshop chaired by G. Benjamin Hocker.

"IEEE Catalog Number--90CH2783-9."

Includes bibliographical references and index.

OCLC:

22372112

Access Restriction:

Restricted for use by site license.