2 options
Micro electro mechanical systems. an investigation of micro structures, sensors, actuators, machines, and robots : proceedings : IEEE, Napa Valley, California, 11-14, February 1990 / sponsored by the IEEE Robotics and Automation Society, and in cooperation with the ASME Dynamic Systems and Control Division.
Connect to full text Available online
View online- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE Workshop on Micro Electro Mechanical Systems (3rd : 1990 : Napa Valley, Calif.)
- Language:
- English
- Subjects (All):
- Electromechanical devices--Congresses.
- Electromechanical devices.
- Miniature objects--Congresses.
- Miniature objects.
- Microelectronics--Congresses.
- Microelectronics.
- Robotics--Congresses.
- Robotics.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xiii, 226 pages : illustrations
- Other Title:
- IEEE micro electro mechanical systems workshop
- Micro Electro Mechanical Systems, 1990, "Proceedings, an investigation of micro structures, sensors, actuators, machines and robots", IEEE.
- Place of Publication:
- New York, NY : IEEE, [1990]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Papers presented at the third IEEE Workshop on Micro Electro Mechanical Systems.
- "IEEE catalog number 90CH2832-4."
- Includes bibliographical references and indexes.
- OCLC:
- 21384299
- Access Restriction:
- Restricted for use by site license.
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.