2 options
Micro electro mechanical systems. an investigation of micro structures, sensors, actuators, machines and robots : proceedings / IEEE, Salt Lake City, Utah, February 20-22, 1989 ; sponsored by the IEEE Robotics and Automation Council.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE Workshop on Micro Electro Mechanical Systems (2nd : 1989 : Salt Lake City, Utah)
- Language:
- English
- Subjects (All):
- Electromechanical devices--Congresses.
- Electromechanical devices.
- Miniature objects--Congresses.
- Miniature objects.
- Microelectronics--Congresses.
- Microelectronics.
- Robotics--Congresses.
- Robotics.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xii, 156 pages : illustrations
- Other Title:
- Investigation of micro structures, sensors, actuators, machines and robots
- IEEE micro electro mechanical systems
- Micro Electro Mechanical Systems, 1989, proceedings, "An investigation of micro structures, sensors, actuators, machines and robots", IEEE.
- Place of Publication:
- Piscataway, NJ : Institute of Electrical and Electronics Engineers, 1989.
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Papers presented at the second IEEE Workshop on Micro Electro Mechanical Systems.
- Includes bibliographies.
- "IEEE catalog number 89TH0249-3."
- OCLC:
- 20998550
- Access Restriction:
- Restricted for use by site license.
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.