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IEEE/SEMI International Semiconductor Manufacturing Science Symposium. theme: "Semiconductor manufacturing" : May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE/SEMI International Semiconductor Manufacturing Science Symposium (1st : 1989 : Burlingame, Calif.)
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 135 pages : illustrations
- Other Title:
- Semiconductor manufacturing
- 1989 IEEE/SEMI International Semiconductor Manufacturing Science Symposium
- Also known as: ISMSS 1989
- Semiconductor Manufacturing Science Symposium, 1989, ISMSS 1989, IEEE/SEMI International.
- Place of Publication:
- New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers ; Piscataway, NJ USA (445 Hoes Lane, Piscataway, 08854) : Additional copies of this Proceedings may be purchased from IEEE Service Center, [1989]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Includes bibliographies.
- IEEE catalog number 89CH2699-7.
- OCLC:
- 20230716
- Access Restriction:
- Restricted for use by site license.
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