LIGA and its applications / edited by Volker Saile ... [and others].

Format:

Book

Contributor:

Saile, Volker.

Series:

Advanced micro & nanosystems ; 7.

Advanced micro & nanosystems ; 7

Language:

English

Subjects (All):

Microelectromechanical systems.

Microtechnology.

Physical Description:

x, 479 pages : illustrations ; 25 cm.

Place of Publication:

Weinheim : Wiley-VCH, [2009]

Summary:

Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies. This book is of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.

Contents:

1 Introduction: LIGA and Its Applications / Volker Saile 1

2 X-ray Masks for LIGA Microfabrication / Yohannes Desta, Jost Goettert 11

3 Innovative Exposure Techniques for 3D Microfabrication / Naoki Matsuzuka, Osamu Tabata 51

4 Hot Embossing of LIGA Microstructures / Mathias Heckele, Matthias Worgull 69

5 Exposure and Development Simulation for Deep X-ray LIGA / Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai, Pascal Meyer 103

6 Design for LIGA and Safe Manufacturing / Ulrich Gengenbach, Ingo Sieber, Ulrike Wallrabe 143

7 Commercialization of LIGA / Ron A. Lawes 189

8 Polymer Optics and Optical MEMS / Jurgen Mohr 205

9 Refractive X-ray Lenses Produced by X-ray Lithography / Arndt Last 233

10 RF Applications / Sven Achenbach, David M. Klymyshyn 243

11 Evolution of the Microspectrometer / Reiner Wechsung, Sven Schonfelder, Andreas Decker 281

12 Actuator Manufacture with LIGA Processes / Todd Christenson 297

13 Development of Microfluidic Devices Created via the LIGA Process / Masaya Kurokawa 323

14 Application of Inspection Devices / Yoshihiro Hirata 337

15 The Micro Harmonic Drive Gear / Reinhard Degen, Rolf Slatter 351

16 Microinjection Molding Machines / Christian Gornik 395

17 Filled Resist Systems / Thomas Hanemann, Claas Muller, Michael Schulz 415

18 Dramatic Downsizing of Soft X-ray Synchrotron Light Source from Compact to Tabletop / Hironari Yamada, Norio Toyosugi, Dorian Minkov, Yoshiko Okazaki 443

19 PTFE Photo-fabrication by Synchrotron Radiation / Takanori Katoh, Yanping Zhang 453.

Notes:

Includes bibliographical references and index.

ISBN:

9783527316984

3527316981

OCLC:

294998391