Plasma nanoscience : basic concepts and applications of deterministic nanofabrication / Kostya (Ken) Ostrikov.

Format:

Book

Author/Creator:

Ostrikov, K. (Kostya)

Language:

English

Subjects (All):

Nanostructured materials.

Plasma engineering.

Low temperature plasmas.

Physical Description:

xxv, 538 pages : illustrations (some color) ; 25 cm

Place of Publication:

Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], [2008]

Summary:

This monograph introduces basic concepts and applications of the Plasma Nanoscience, which is a rapidly emerging multidisciplinary research area at the forefront of the physics of plasmas and gas discharges, nanoscience and nanotechnology, astrophysics, materials science and engineering, surface science and structural chemistry, and shows the importance and specific roles of the plasma environments in nano-scale processes spanning from astrophysics to plasma-aided nanofabrication.

This research aims to deterministically create and manipulate building units and control their assembly, and by using suitable plasma environments eventually develop most effective and commercially viable plasma-based nanofabrication facilities and processes.

This monograph also addresses the important issue how to challenge one of the previously intractable problems of deterministic plasma-based nanofabrication, which implies the ability to create nano-objects with the required composition, structure, and properties in envisaged applications. Examples include but are not limited to quantum dots, nanoparticles, nanotubes, nanowires, nanofibers, nanorods, nanowalls and their arrays as well as a range of nanostructured films and surfaces with unique properties. This book is suitable not only to researchers, engineers and postgraduate students but also to college and school teachers, undergraduate students and general public interested in multidisciplinary nanoscience and nanotechnology.

Contents:

1.1 Main Concepts and Issues 2

1.2 Self-Organized Nanoworld, Commonsense Science of the Small and Socio-Economic Push 7

1.3 Nature's Plasma Nanofab and Nanotechnology Research Directions 21

1.4 Deterministic Nanofabrication and Plasma Nanoscience 28

1.5 Structure of the Monograph and Advice to the Reader 43

2 What Makes Low-Temperature Plasmas a Versatile Nanotool? 49

2.1 Basic Ideas and Major Issues 50

2.2 Plasma Nanofabrication Concept 55

2.3 Useful Plasma Features for Nanoscale Fabrication 66

2.4 Choice and Generation of Building and Working Units 72

2.5 Effect of the Plasma Sheath 81

2.6 How Plasmas Affect Elementary Surface Processes 97

3 Specific Examples and Practical Framework 107

3.1 Semiconducting Nanofilms and Nanostructures 107

3.2 Carbon-Based Nanofilms and Nanostructures 117

3.3 Practical Framework - Bridging Nine Orders of Magnitude 133

4 Generation of Building and Working Units 145

4.1 Species in Methane-Based Plasmas for Synthesis of Carbon Nanostructures 146

4.1.1 Experimental Details 149

4.1.2 Basic Assumptions of the Model 152

4.1.3 Particle and Power Balance in Plasma Discharge 153

4.1.4 Densities of Neutral and Charged Species 155

4.1.4.1 Effect of RF Power 156

4.1.4.2 Effect of Argon and Methane Dilution 158

4.1.5 Deposited Neutral and Ion Fluxes 159

4.1.6 Most Important Points and Summary 162

4.2 Species in Acetylene-Based Plasmas for Synthesis of Carbon Nanostructures 164

4.2.1 Formulation of the Problem 165

4.2.2 Number Densities of the Main Discharge Species 167

4.2.3 Fluxes of Building and Working Units 171

4.3 Nanocluster and Nanoparticle Building Units 177

4.3.1 Nano-Sized Building Units from Reactive Plasmas 177

4.3.2 Nanoparticle Generation: Other Examples 182

5 Transport, Manipulation and Deposition of Building and Working Units 199

5.1 Microscopic Ion Fluxes During Nanoassembly Processes 200

5.1.1 Formulation and Model 202

5.1.2 Numerical Results 204

5.1.3 Interpretation of Numerical Results 209

5.2 Nanoparticle Manipulation in the Synthesis of Carbon Nanostructures 213

5.2.1 Nanoparticle Manipulation: Experimental Results 215

5.2.2 Nanoparticle Manipulation: Numerical Model 220

5.3 Selected-Area Nanoparticle Deposition Onto Microstructured Surfaces 227

5.3.1 Numerical Model and Simulation Parameters 228

5.3.2 Selected-Area Nanoparticle Deposition 231

5.3.3 Practical Implementation Framework 237

5.4 Electrostatic Nanoparticle Filter 239

6 Surface Science of Plasma-Exposed Surfaces and Self-Organization Processes / K. Ostrikov, I. Levchenko 249

6.1 Synthesis of Self-Organizing Arrays of Quantum Dots: Objectives and Approach 251

6.2 Initial Stage of Ge/Si Nanodot Formation Using Nanocluster Fluxes 272

6.2.1 Physical Model and Numerical Details 273

6.2.2 Physical Interpretation and Relevant Experimental Data 277

6.3 Binary Si[subscript x]C[subscript 1-x] Quantum Dot Systems: Initial Growth Stage 282

6.3.1 Adatom Fluxes at Initial Growth Stages of Si[subscript x]C[subscript 1-x] Quantum Dots 282

6.3.2 Control of Core-Shell Structure and Elemental Composition of Si[subscript x]C[subscript 1-x] Quantum Dots 294

6.4 Self-Organization in Ge/Si Nanodot Arrays at Advanced Growth Stages 301

6.4.1 Model of Nanopattern Development 303

6.4.2 Ge/Si QD Size and Positional Uniformity 307

6.4.3 Self-Organization in Ge/Si QD Patterns: Driving Forces and Features 310

6.5 Self-Organized Nanodot Arrays: Plasma-Specific Effects 314

6.5.1 Matching Balance and Supply of BUs: a Requirement for Deterministic Nanoassembly 315

6.5.2 Other General Considerations 317

6.5.3 Plasma-Related Effects at Initial Growth Stages 319

6.5.4 Separate Growth of Individual Nanostructures 321

6.5.5 Self-Organization in Large Nanostructure Arrays 327

7 Ion-Focusing Nanoscale Objects 341

7.1 General Considerations and Elementary Processes 343

7.2 Plasma-Specific Effects on the Growth of Carbon Nanotubes and Related Nanostructures 356

7.2.1 Plasma-Related Effects on Carbon Nanofibers 357

7.2.2 Effects of Ions and Atomic Hydrogen on the Growth of SWCNTs 364

7.3 Plasma-Controlled Reshaping of Carbon Nanostructures 373

7.3.1 Self-Sharpening of Platelet-Structured Nanocones 373

7.3.2 Plasma-Based Deterministic Shape Control in Nanotip Assembly 380

7.4 Self-Organization of Large Nanotip Arrays 385

7.5 From Non-Uniform Catalyst Islands to Uniform Nanoarrays 391

7.5.1 Experiment and Film Characterization 393

7.5.2 Growth Model and Numerical Simulations 397

7.6 Other Ion-Focusing Nanostructures 402

8 Building and Working Units at Work: Applications 415

8.1 Plasma-Based Post-Processing of Nanoarrays 416

8.1.1 Post-Processing of Nanotube Arrays 418

8.1.2 Functional Monolayer Coating of Nanorod Arrays 422

8.2 i-PVD of Metal Nanodot Arrays Using Nanoporous Templates 427

8.3 Metal Oxide Nanostructures: Plasma-Generated BUs Create Other BUs on the Surface 434

8.4 Biocompatible TiO[subscript 2] Films: How Building Units Work 440

8.4.1 TiO[subscript 2] Film Deposition and Characterization 442

8.4.2 In Vitro Apatite Formation 446

8.4.3 Growth Kinetics: Building Units at Work 448

8.4.4 Building Units In Vitro: Inducing Biomimetic Response 453

9 Conclusions and Outlook 461

9.1 Determinism and Higher Complexity 464

9.2 Plasma-Related Features and Areas of Competitive Advantage 467

9.3 Outlook for the Future 470

10 Appendix A. Reactions and Rate Equations 483

10.1 Plasmas of Ar + H[subscript 2] + CH[subscript 4] Gas Mixtures (Section 4.1) 483

10.2 Plasmas of Ar + H[subscript 2] + C[subscript 2]H[subscript 2] Gas Mixtures (Section 4.2) 486

11 Appendix B. Why Plasma-based Nanoassembly: Further Reasons 491

11.1 Carbon Nanotubes and Related Structures 491

11.2 Semiconductor Nanostructures and Nanomaterials 493

11.3 Other Nanostructures and Nanoscale Objects 494

11.4 Materials with Nanoscale Features 496

11.5 Plasma-Related Issues and Fabrication Techniques 497.

Notes:

Includes bibliographical references (pages 499-527) and index.

ISBN:

9783527407408

3527407405

OCLC:

226976496