Microsystem engineering of lab-on-a-chip devices / edited by Oliver Geschke, Henning Klank, Pieter Tellemann.

Format:

Book

Contributor:

Geschke, Oliver.

Klank, Henning.

Telleman, Pieter.

Language:

English

Subjects (All):

Microelectronics.

Physical Description:

xi, 285 pages : illustrations ; 25 cm

Edition:

Second, revised and enlarged edition.

Place of Publication:

Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2008.

Summary:

Edited by an interdisciplinary team of scientists at one of the leading centers for microsystem research, this second edition retains the proven structure of its predecessor, enlarged by around 10%. Focusing on analytical applications mainly in life sciences, this is an invaluable companion for fast and automated analytical procedures, providing a concise practical approach to microtechnology.

Contents:

1.1 Learning from the Experiences of Microelectronics 1

1.2 The Advantages of Miniaturizing Systems for Chemical Analysis 2

1.3 From Concept to [mu]TAS 4

2 Clean Rooms / Daria Petersen, Pieter Telleman 9

3 Microfluidics - Theoretical Aspects / Jorg P. Kutter, Henning Klank 13

3.1 Fluids and Flows 14

3.2 Transport Processes 21

3.2.1 Types of Transport 21

3.2.1.1 Convection 21

3.2.1.2 Migration 22

3.2.1.3 Diffusion 23

3.2.1.4 Dispersion 26

3.3 System Design 26

3.3.1 Laminar Flow and Diffusion in Action 27

3.4 An Application: Biological Fluids 35

4 Microfluidics - Components / Jorg P. Kutter, Klaus Bo Mogensen, Henning Klank, Oliver Geschke 39

4.1 Valves and Pumps 39

4.1.1 Moving Liquids by Electroosmosis 46

4.1.2 Mixers 50

4.2 Injecting, Dosing, and Metering 54

4.3 Temperature Measurement in Microfluidic Systems 58

4.3.1 Microreactors 59

4.3.2 Temperature Sensors for Microsystems 60

4.3.3 Resistance Temperature Detectors 60

4.3.3.1 Metals 60

4.3.3.2 Nonmetals 61

4.3.4 Thermocouples 63

4.3.5 Semiconductor Junction Sensors 63

4.3.6 Temperature Sensors Built on Other Principles 64

4.4 Optical Sensors 65

4.4.1 Instrumentation 66

4.4.2 Absorption Detection 67

4.4.3 Optical Waveguidance 70

4.4.4 Fluorescence Detection 74

4.5 Electrochemical Sensors 77

5 Simulations in Microfluidics / Goran Goranovic, Henrik Bruus 83

5.1 Physical Aspects and Design 84

5.2 Choosing Software and Hardware 87

5.2.1 CFD-ACE+Version 6.6 87

5.2.2 CoventorWare Version 2001.3 88

5.2.3 Hardware 89

5.2.4 The Core Elements of Typical CFD Software 89

5.2.5 Pre-processors 89

5.2.6 Solvers 93

5.2.7 Post-processors 93

5.3 Important Numerical Settings 94

5.3.1 Boundary Conditions 94

5.3.2 Solver Settings 95

5.4 Errors and Uncertainties 99

5.5 Interpretation and Evaluation of Simulations 99

5.6 Example Simulations 100

5.6.1 Fully-developed Flow in a Circular Capillary 100

5.6.2 Movement of a Chemical Plug by Electroosmotic Flow in a Detection Cell 104

6 Silicon and Cleanroom Processing / Anders Michael Jorgensen, Klaus Bo Mogensen 121

6.1 Substrate Fabrication 122

6.2 Optical Lithography 126

6.2.1 Photolithography 126

6.2.2 Mask Design 131

6.2.3 Hints in Planning Fabrication Runs 134

6.3 Deposition 136

6.3.1 Fundamentals of Coatings 136

6.3.2 Deposition Methods 138

6.3.3 Materials 142

6.3.4 Lift-off 146

6.3.5 Silicides 147

6.4 Etching 147

6.4.1 Wet-etching Fundamentals 148

6.4.2 Etching with HF 148

6.4.3 Isotropic Silicon Etch 149

6.4.4 Orientation-dependent Silicon Etching 150

6.4.5 Common Orientation-dependent Etchants 152

6.4.6 Other Etchants 152

6.4.7 Effects of Not Stirring a Transport-limited Etch 152

6.5 Dry Etching 153

6.5.1 Plasma Etching Fundamentals 154

6.5.2 Plasma Etching Setups 156

6.5.3 Etch Gases 159

6.5.4 Laser-assisted Etching 160

6.6 Heat Treatment 160

6.6.1 Thermal Oxidation 160

6.6.2 Diffusion 163

6.6.3 Annealing 164

6.6.4 Wafer Bonding 164

7 Glass Micromachining / Daria Petersen, Klaus Bo Mogensen, Henning Klank 167

7.1 Wet Chemical Etching 169

7.2 Reactive Ion Etching (RIE) of Glass 169

7.3 Laser Patterning 169

7.4 Powder Blasting 170

7.5 Glass Bonding 170

7.6 A Microfabrication Example 172

8 Polymer Micromachining / Oliver Geschke, Henning Klank, Klaus Bo Mogensen 175

8.1 Hot Embossing 176

8.2 Injection Molding 179

8.3 Casting 179

8.3.1 A microfabrication example: Casting of polydimethylsiloxane (PDMS) microfluidic devices 180

8.4 Laser Micromachining 181

8.5 Milling 183

8.6 X-ray and Ultraviolet Polymer Lithography 184

8.7 Sealing of Polymer Microstructures 185

8.8 Adding Functionalities 187

8.9 Examples of Polymer Microstructures 188

9 Packaging of microfluidic Systems / Gerardo Perozziello 193

9.1 Levels of packaging 195

9.1.1 Substrate Level Packaging 195

9.1.2 Multichip Packages 196

9.1.3 Unconventional packages 197

9.2 Factors influencing the packaging design and reliability 198

9.3 Materials 199

9.4 Interconnections 201

9.4.1 Fluidic interconnections 201

9.4.2 Fluidic interconnections modeling 204

9.4.2.1 External interconnections modeling 204

9.4.2.2 Integrated interconnection modeling 205

9.4.3 Electrical Interconnections 208

9.4.4 Optical interconnections 210

9.4.4.1 Waveguides 212

9.4.4.2 Outer world optical connection 215

10 Determination of Topography / Henning Klank

10.1 Topography - General Discussion 221

10.2 Importance and Relevance of Topography 222

10.3 Topographical Determination Considerations 222

10.3.1 Sample Positioning 222

10.3.2 Invasive and Non-invasive Measurement Methods 223

10.3.3 Range and Resolution 223

10.3.4 Dimensions 224

10.3.5 Geometrical Considerations 224

10.4 Topographical Characterization Methods and Instruments 224

10.4.2 Profilometer 224

10.4.2.1 Operating Principle 224

10.4.2.2 Advantages and Disadvantages 225

10.4.3 Optical Microscope 226

10.4.3.1 Operating Principle 226

10.4.3.2 Advantages and Disadvantages 228

10.4.4 Scanning Electron Microscope (SEM) 229

10.4.4.1 Operating Principle 229

10.4.4.2 Advantages and Disadvantages 231

10.4.4.3 Environmental Scanning Electron Microscope (ESEM) 232

10.4.5 Atomic Force Microscope (AFM) 233

10.4.5.1 Operating Principle 233

10.4.5.2 Advantages and Disadvantages 234

10.4.6 Confocal Microscope 235

10.4.6.1 Operating Principle 235

10.4.6.2 Advantages and Disadvantages 236

10.5 Topographical Examination of a Typical Sample 238

11 Analytical Chemistry on Microsystems / Jorg Kutter, Oliver Geschke

11.1 Sensors and Sensor Systems 244

11.2 Biosensors 247

11.3 Flow Injection Analysis 249

11.4 Separation Techniques 252

11.4.1 Free-zone Electrophoresis 254

11.4.2 Gel Electrophoresis 256

11.4.3 Micellar Electrokinetic Chromatography (MEKC) 257

11.4.4 Open-channel Electrochromatography (OCEC) 260

11.4.5 Packed-bed Chromatography 261

11.4.6 Microfabricated Stationary-phase Support Structures 261

11.4.7 In-situ-polymerized Stationary Phases 264

11.4.8 Synchronous Cyclic Capillary Electrophoresis (SCCE) 265

11.4.9 Two-dimensional Separations 266

11.4.10 Hydrodynamic Chromatography (HDC) 268

11.4.11 Shear-driven Chromatography 269

11.5 Other Analytical Techniques 270

11.5.1 Solid-phase Extraction (SPE) 270

11.5.2 Electrokinetic Enrichment of DNA 272

11.5.3 Electrostacking 272.

Notes:

Previous ed.: 2004.

Includes bibliographical references and index.

ISBN:

9783527319428

3527319425

OCLC:

173721105