Automated nanohandling by microrobots / Sergej Fatikow, editor.

Format:

Book

Contributor:

Fatikow, S. (Sergej), 1960-

Alumni and Friends Memorial Book Fund.

Series:

Springer series in advanced manufacturing

Language:

English

Subjects (All):

Microfabrication.

Microelectromechanical systems.

Robotics.

Nanostructured materials.

Robots, Industrial.

Physical Description:

xvi, 346 pages : illustrations ; 24 cm.

Place of Publication:

London : Springer, [2008]

Summary:

The rapid development of nanotechnology has created a need for advanced nanohandling tools and techniques. One active branch of research in this area focuses on the use of microrobots for automated handling of micro- and nanoscale objects. Automated Nanohandling by Microrobots presents work on the development of a versatile microrobot-based nanohandling-robot station inside a scanning electron microscope (SEM). The SEM serves as a powerful vision sensor, providing a high resolution and a high depth of focus, allowing different fields of application to be opened up.

The pre-conditions for using a SEM are high-precision, user-friendly microrobots which can be integrated into the SEM chamber and equipped with application-specific tools. Automated Nanohandling by Microrobots introduces an actuation principle for such microrobots and presents a new robot design. Different aspects of this research field regarding the hardware and software implementation of the system components, including the sensory feedback for automated nanohandling, are discussed in detail. Extensive applications of the microrobot station for nanohandling, nano-characterization and nanostructuring are provided, together with the experimental results.

Based upon the Microrobotics course for students of computer sciences and physics at the University of Oldenburg, Automated Nanohandling by Microrobots provides the practicing engineer and the engineering student with an introduction to the design and applications of robot-based nanohandling devices. Those unfamiliar with the subjects will find the text, which is complemented throughout by the extensive use of illustrations, clear and simple to understand.

The Springer Series in Advanced Manufacturing publishes the best teaching and reference material to support students, educators and practitioners in manufacturing technology and management. This international series includes advanced textbooks, research monographs, edited works and conference proceedings covering all subjects in advanced manufacturing. The series focuses on new topics of interest, new treatments of more traditional areas and coverage of the applications of information and communication technology (ICT) in manufacturing.

Contents:

1 Trends in Nanohandling 1

1.1 Introduction 1

1.2 Trends in Nanohandling 3

1.2.1 Self-assembly 3

1.2.2 SPM as a Nanohandling Robot 5

1.3 Automated Microrobot-based Nanohandling 8

1.4 Structure of the Book 11

2 Robot-based Automated Nanohandling 23

2.1 Introduction 23

2.2 Vision Sensors for Nanohandling Automation 25

2.2.1 Comparison of Vision Sensors for Nanohandling Automation 26

2.2.2 Zoom Steps and Finding of Objects 29

2.2.3 SEM-related Issues 31

2.2.3.1 Sensor Resolution and Object Recognition 31

2.2.3.2 Noise 33

2.2.3.3 Velocity and Image Acquisition Time 33

2.3 Automated Nanohandling: Problems and Challenges 34

2.3.1 Parasitic Forces 34

2.3.2 Contact Detection 36

2.4 General Description of Assembly Processes 37

2.4.1 Description of the Single Tasks 38

2.4.2 General Flowchart of Handling Tasks 40

2.5 Approaches for Improving Reliability and Throughput 40

2.5.1 Improving Reliability 40

2.5.2 Improving Throughput 41

2.6 Automated Microrobot-based Nanohandling Station 42

2.6.1 AMNS Components 43

2.6.1.1 Setup 43

2.6.1.2 Actuators 44

2.6.1.3 Mobile Microrobots 45

2.6.1.4 Sensors 46

2.6.1.5 Control Architecture 47

2.6.1.6 User Interface 48

2.6.2 Experimental Setup: Handling of TEM Lamellae 49

2.7 Conclusions 52

3 Learning Controller for Microrobots 57

3.1 Introduction 57

3.1.1 Control of Mobile Microrobots 57

3.1.2 Self-organizing Map as Inverse Model Controller 58

3.2 Closed-loop Pose Control 62

3.2.1 Pose and Velocity 62

3.2.2 Trajectory Controller 63

3.2.3 Motion Controller 64

3.2.4 Actuator Controller 65

3.2.5 Flexible Timing During Pose Control 65

3.3 The SOLIM Approach 66

3.3.1 Structure and Principle 66

3.3.2 Mapping 68

3.3.2.1 Interpolation 69

3.3.2.2 Influence Limits 72

3.3.2.3 Extrapolation 74

3.3.3 Learning 76

3.3.3.1 Approximation 76

3.3.3.2 Self-organization in Output Space 78

3.3.3.3 Self-organization in Input Space 82

3.3.4 Conclusions 83

3.4 SOLIM in Simulations 83

3.4.1 Mapping 83

3.4.2 Learning 85

3.4.2.1 Procedure 85

3.4.2.2 Inverse Kinematics 87

3.5 SOLIM as Actuator Controller 89

3.5.1 Actuation Control 89

3.5.2 Manual Training 91

3.5.3 Automatic Training 93

3.6 Conclusions 96

3.6.1 Summary 96

3.6.2 Outlook 97

3.6.2.1 Extrapolation 97

3.6.2.2 Computational Load 97

3.6.2.3 Predefined Network Size 98

3.6.2.4 Applications for SOLIM 98

4 Real-time Object Tracking Inside an SEM 103

4.1 Introduction 103

4.2 The SEM as Sensor 104

4.3 Integration of the SEM 106

4.4 Cross-correlation-based Tracking 107

4.5 Region-based Object Tracking 111

4.5.1 The Energy Functions 111

4.5.2 Fast Implementation 114

4.5.3 Minimization 116

4.5.4 Evaluation and Results 119

4.5.4.1 Performance 119

4.5.4.2 Robustness Against Additive Noise 120

4.5.4.3 Robustness Against Clutter 121

4.5.4.4 Robustness Against Gray-level Fluctuations 123

4.6 Conclusions 124

4.6.1 Summary 124

4.6.2 Outlook 126

5 3D Imaging System for SEM 129

5.1 Introduction 129

5.2 Basic Concepts 130

5.2.1 General Stereoscopic Image Approach 130

5.2.1.1 The Cyclopean View 131

5.2.1.2 Disparity Space 131

5.2.1.3 Vergence and Version 132

5.2.1.4 Vergence System 134

5.2.2 Principle of Stereoscopic Image Approaches in the SEM 135

5.2.2.1 Structure of the SEM 135

5.2.2.2 Generation of Stereoscopic Images in the SEM 136

5.2.2.3 Influences on the Disparity Space 138

5.2.4 Mathematical Basics 139

5.2.3.1 Convolution 139

5.2.3.2 Frequency Analysis 139

5.2.3.3 Gabor Function 141

5.2.4 Biological Vision Systems 143

5.2.4.1 Neuron Models 143

5.2.4.2 Depth Perception in Biological Vision Systems 144

5.2.4.3 Energy Models 144

5.3 Systems for Depth Detection in the SEM 145

5.3.1 Non-stereoscopic Image Approaches 146

5.3.2 Stereoscopic Image Approaches 147

5.4 3D Imaging System for Nanohandling in an SEM 148

5.4.1 Structure of the 3D Imaging System for SEM 148

5.4.2 Image Acquisition and Beam Control 149

5.4.3 The 3D Module 151

5.4.3.1 Stereo System 152

5.4.3.2 Vergence System 156

5.5 Application of the 3D Imaging System 158

5.5.1 Results of the 3D Imaging System 158

5.5.2 Application for the Handling of CNTs 160

5.5.3 Application for the Handling of Crystals 161

5.6 Conclusions 161

5.6.1 Summary 161

5.6.2 Outlook 163

6 Force Feedback for Nanohandling 167

6.1 Introduction 167

6.2 Fundamentals of Micro/Nano Force Measurement 168

6.2.1 Principles of Force Measurement 168

6.2.2 Types of Forces in Robotics 170

6.2.2.1 Gripping Forces 170

6.2.2.2 Contact Forces 172

6.2.3 Characteristics of the Micro- and Nanoworld 172

6.2.4 Requirements on Force Feeback for Nanohandling 174

6.2.5 Specific Requirements of Force Feedback for Microrobots 177

6.3 State-of-the-art 178

6.3.1 Micro Force Sensors 178

6.3.1.1 Piezoresistive Micro Force Sensors 178

6.3.1.2 Piezoelectric Micro Force Sensors 180

6.3.1.3 Capacitive Micro Force Sensors 180

6.3.1.4 Optical Methods for Micro Force Measurement 181

6.3.1.5 Commercial Micro Force Sensors 183

6.3.2 Microgrippers with Integrated Micro Force Sensors 183

6.3.3 Robot-based Nanohandling Systems with Force Feedback 184

6.3.3.1 Industrial Microhandling Robots 185

6.3.3.2 Microrobots Outside the Scanning Electron Microscope 188

6.3.3.3 Microrobots Inside the Scanning Electron Microscope 192

6.3.3.4 Mobile Microrobots 193

6.3.4 AFM-based Nanohandling Systems 195

6.3.4.1 Commercial and Custom-made AFMs for Nanohandling 195

6.3.4.2 AFMs combined with Haptic Devices and Virtual Reality 196

6.3.4.3 AFMs integrated into Scanning Electron Microscopes 196

6.4 Conclusions 197

7 Characterization and Handling of Carbon Nanotubes 203

7.1 Introduction 203

7.2 Basics of Carbon Nanotubes 204

7.2.1 Structure and Architecture 204

7.2.2 Electronic Properties 205

7.2.3 Mechanical Properties 207

7.2.4 Fabrication Techniques 208

7.2.4.1 Production by Arc Discharge 208

7.2.4.2 Production by Laser Ablation 209

7.2.4.3 Production by Chemical Vapor Deposition (CVD) 209

7.2.5 Applications 210

7.2.5.1 Composites 211

7.2.5.2 Field Emission 211

7.2.5.3 Electronics 212

7.2.5.4 AFM Cantilever Tips 212

7.3 Characterization of CNTs 213

7.3.1 Characterization Techniques and Tools 213

7.3.1.1 Microscopic Characterization Methods 213

7.3.1.2 Spectroscopic Characterization Methods 214

7.3.1.3 Diffractional Characterization Methods 215

7.3.2 Advantages of SEM-based Characterization of CNTs 215

7.4 Characterization and Handling of CNTs in an SEM 216

7.5 AMNS for CNT Handling 218

7.5.1 Experimental Setup 218

7.5.2 Gripping and Handling of CNTs 220

7.5.3 Mechanical Characterization of CNTs 221

7.6 Towards Automated Nanohandling of CNTs 224

7.6.1 Levels of Automation 224

7.6.2 Restrictions on Automated Handling Inside an SEM 225

7.6.3 Control System Architecture 226

7.6.4 First Implementation Steps 230

7.7 Conclusions 231

8 Characterization and Handling of Biological Cells 237

8.1 Introduction 237

8.2 AFM Basics 239

8.2.1 Cantilever Position Measurement 239

8.2.1.1 Optical: Laser Beam Deflection 240

8.2.1.2 Self-sensing: Piezoelectric and Piezoresistive 240

8.2.2 AFM Modes 240

8.2.2.1 Contact Mode 240

8.2.2.2 Dynamic Mode 241

8.2.2.3 Lateral Force Mode 242

8.2.2.4 Jumping Mode/Force Volume Mode and Force Distance Curves 242

8.2.3 Measurements of Different Characteristics 243

8.2.3.1 Mechanical Characterization 243

8.2.3.2 Magnetic Force Measurements 245

8.2.3.3 Conductivity Measurements 245

8.2.3.4 Molecular Recongnition Force

Measurements 246

8.2.4 Sample Preparation 247

8.2.5 Cantilevers 247

8.2.6 Video Rate AFMs 248

8.2.7 Advantages and Disadvantages of AFM for Biohandling 248

8.3 Biological Background 249

8.3.1 Characteristics of Cells 249

8.3.1.1 Mechanical Characteristics 249

8.3.1.2 Electrical Characteristics 250

8.3.1.3 Chemical Characteristics 251

8.3.2 Escherichia Coli Bacterium 251

8.3.3 Ion Channels 252

8.3.4 Intermolecular Binding Forces 253

8.4 AFM in Biology - State-of-the-art 254

8.4.1 Imaging 254

8.4.2 Physical, Electrical, and Chemical Properties 255

8.4.2.1 Elasticity and Stiffness Measurements 255

8.4.2.2 Intermolecular Binding Forces 256

8.4.2.3 Adhesion Forces 256

8.4.2.4 Cell Pressure 257

8.4.2.5 Virus Shell Stability 257

8.4.2.6 Electrical Properties of DNA 257

8.4.3 Cooperation and Manipulation with an AFM 258

8.4.3.1 Stimulation and Recording of Mechanosenstive Ion Channels 258

8.4.3.2 Cutting and Extraction Processes on Chromosomes 258

8.4.4 Additional Cantilever 259

8.5 AMNS for Cell Handling 259

8.5.1 Experimental Setup 259

8.5.2 Control System 260

8.5.3 Calculation of the Young's Modulus 261

8.5.4 Experimental Results 262

8.6 Conclusions 263

8.6.1 Summary 263

8.6.2 Outlook 263

9 Material Nanotesting 267

9.1 Instrumented Indentation 267

9.1.1 Sharp Indentation 267

9.1.1.1 Introduction 267

9.1.1.2 Basic Concepts of Materials Mechanics 270

9.1.1.3 Similarity Between Sharp Indenters of Different Shape 270

9.1.1.4 Indentation Ranges: Nano-, Micro-, and Macroindentation 271

9.1.1.5 Analysis of Load Depth Curves 271

9.1.1.6 Applications of the Sharp Instrumented Indentation 277

9.1.2 Spherical Indentation 279

9.1.2.1 Comparing Spherical and Sharp Instrumented Indentation 279

9.1.2.2 Analysis of Load Depth Curves Using Spherical Indenters 280

9.1.2.3 Applications of Spherical Instrumented Indentation 281

9.2 Microrobot-based Nanoindentation of Electrically Conductive Adhesives 281

9.2.1 Experiments 282

9.2.1.1 Material System 282

9.2.1.2 Description of the Experimental Setup 283

9.2.1.3 The AFM Cantilever 285

9.2.1.4 Description of the NMT Module 286

9.2.1.5 Experimental Procedure 286

9.2.2 Calibrations 287

9.2.2.1 Calibration of the Stiffness 287

9.2.2.2 Electrical Calibration 288

9.2.3 Preliminary Results 288

9.2.3.1 Dependency on the Hardness of the ECA on the Curing Time 288

9.2.4 Discussion 289

9.2.4.1 Different Tip Shapes 289

9.3 Conclusions 292

10 Nanostructuring and Nanobonding by EBiD 295

10.1 Introduction to EBiD 295

10.1.1 History of EBiD 297

10.1.2 Applications of EBiD 298

10.2 Theory of Deposition Processes in the SEM 299

10.2.1 Scanning Electron Microscopy for EBiD 299

10.2.1.1 Generation of the Electron Beam 299

10.2.1.2 General SEM Setup 301

10.2.1.3 Secondary Electron Detector 302

10.2.2 Interactions Between Electron Beam and Substrate 303

10.2.2.1 Energy Spectrum of Emerging Electrons 303

10.2.2.2 Range of Secondary Electrons 305

10.2.2.3 Results 309

10.2.3 Modeling the EBiD Process 310

10.2.3.1 Rate Equation Model 310

10.2.3.2 Parameter Determination for the Rate Equation Model 312

10.2.3.3 Influence of the SE 314

10.2.3.4 Heat Transfer Calculations 315

10.3 Gas Injection Systems (GIS) 316

10.3.1 Introduction 316

10.3.2 The Molecular Beam 317

10.3.2.1 Modeling of the Mass Flow Between Reservoir and Substrate 317

10.4 Mobile GIS 322

10.4.1 General Setup 322

10.4.2 Position Control of the GIS 323

10.4.3 Pressure Control 324

10.4.3.1 Constant Evaporation Systems 324

10.4.3.2 Heating/Cooling Stages 324

10.4.3.3 Control of the Molecular Flux 325

10.4.3.4 Pressure Dependence of the Deposition Rate 326

10.4.4 Multimaterial Depositions 327

10.5 Process Monitoring and Control 329

10.5.1 Time-based Control (Open-loop Control) 329

10.5.2 Closed-loop Control of EBiD Deposits 330

10.5.2.1 Growth of Pin-like Deposits and SE-signal 331

10.5.2.2 Application for 2D Deposits 332

10.5.3 Failure Detection 334

10.6 Mechanical Properties of EBiD Deposits 336

10.7 Conclusions 336

10.7.1 Summary 336

10.7.2 Outlook 337.

Notes:

Includes bibliographical references and index.

Local Notes:

Acquired for the Penn Libraries with assistance from the Alumni and Friends Memorial Book Fund.

ISBN:

9781846289774

1846289777

9781846289781

1846289785

OCLC:

144596803

Online:

Publisher description