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Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya.
LIBRA TK7875 .R45 2008
Available from offsite location
- Format:
- Book
- Series:
- Advanced micro & nanosystems ; v. 6.
- Advanced micro & nanosystems ; v. 6
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Reliability.
- Microelectromechanical systems.
- Reliability.
- Physical Description:
- xx, 303 pages : illustrations ; 25 cm.
- Place of Publication:
- Weinheim : Wiley-VCH, 2008.
- Notes:
- "Testing of materials and devices"--Cover.
- Includes bibliographical references and index.
- ISBN:
- 3527314946
- 9783527314942
- OCLC:
- 188552319
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