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Microsystems mechanical design / edited by Francesco de Bona, Eniko T. Enikov.
LIBRA TK7875 .M454 2006
Available from offsite location
- Format:
- Book
- Series:
- Courses and lectures ; No. 478.
- Courses and lectures ; No. 478
- Language:
- English
- Subjects (All):
- Microelectromechanical systems.
- Micromechanics.
- Physical Description:
- 211 pages : 172 illustrations ; 25 cm.
- Place of Publication:
- Wien : Springer, 2006.
- Contents:
- Introduction to micro-systems and to the techniques for their fabrication / E. T. Enikov
- Microstructures under electrostatic loads / F. De Bona
- Dynamics of mechatronic systems at microscale / E. Brusa
- Continuum microstructures loaded electrostatically / F. De Bona & M. Gh. Munteanu
- Design of electro-thermal micro-positioners / K.V. Lazarov & E.T. Enikov
- Design of compliant micromechanisms / F. De Bona & S. Zelenika
- Micro- and nano-assemby and manipulation techniques for MEMS / E. T. Enikov
- Microfluidics / L.M. Lee, L.S.L. Cheung, Y. Zohar.
- Notes:
- Includes bibliographic references.
- ISBN:
- 3211374531
- OCLC:
- 71814368
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