Recent advances in laser processing of materials / editors, Jacques Perrière, Eric Millon, Eric Fogarassy.

Format:

Book

Contributor:

Perrière, J. (Jacques)

Millon, Eric.

Fogarassy, E. (Eric)

Language:

English

Subjects (All):

Lasers--Industrial applications.

Lasers.

Physical Description:

xxi, 446 pages : illustrations ; 25 cm

Edition:

First edition.

Place of Publication:

Amsterdam ; Boston : Elsevier, 2006.

Summary:

Over the past two decades new technological needs in key areas such as microelectronics, nanoscience or biology have motivated the development of novel alternative techniques able to respond to the new demand for more precision, higher resolution and better surface and volume localisation. This development would certainly not be possible without the strong development of new laser sources.

This book focuses on recently developed trends involving laser treatments, including the formation of nanomaterials by laser assisted methods, the modifications induced by laser irradiations in the near surface region of organic or biomaterials, the various processes used for the micro and nanostructuration of solid surfaces. In response to renewed interest within the field, the classical aspects of laser crystallisation, doping or cleaning are also explored.

Contents:

Introduction to the Laser Processing of Materials / J. Perriere, E. Millon, E. Fogarassy xi

Chapter 1 Laser Ablation-Based Synthesis of Nanomaterials / A. V. Kabashin, M. Meunier 1

1.2 General Aspects of Laser Ablation and Nanocluster Formation 2

1.2.1 Nucleation 6

1.2.2 Kinetics-Controlled Growth 6

1.2.3 Diffusion-Controlled Growth 6

1.2.4 Transition Phase 7

1.2.5 Ostwald Ripening 7

1.3 Synthesis of Nanomaterials in Gaseous Environment 8

1.3.1 Configuration of Conventional Pulsed-Laser Deposition for Production of Nanomaterials 9

1.3.2 Studies of Laser Ablation-Based Nanocluster Growth in a Residual Buffer Gas 10

1.3.3 Properties of Nanostructured Si-Based Films Prepared by Pulsed-Laser Deposition 15

1.3.4 Use of Other Laser Ablation-Based Methods for Producing Nanostructures 19

1.4 Synthesis of Nanomaterials in Liquid Environment: Production of Colloidal Nanoparticles 20

1.4.1 Physical Aspects of Laser Ablation in Liquid Environment 22

1.4.2 Fabrication of Ultrapure Colloids in Chemical Solutions 26

Chapter 2 Metal-Dielectric Nanocomposites Produced by Pulsed Laser Deposition: A Route for New Functional Materials / C.N. Afonso, J. Gonzalo, R. Serna, J. Solis 37

2.2 Production of Metal-Dielectric Nanocomposites 38

2.2.1 Features, Advantages and Limitations of Pulsed Laser Deposition 38

2.2.2 Control of the Deposition Sequence: Alternate PLD 40

2.2.3 The Role of PLD Parameters on Morphological and Structural Properties of Nanocomposite Films 41

2.3 Properties and Applications of Metal-Dielectric Nanocomposites 53

2.3.1 Optical Properties 53

2.3.2 Magnetic Properties 62

2.3.3 Thermal Properties 65

Chapter 3 Carbon-Based Materials by Pulsed Laser Deposition: From Thin Films to Nanostructures / T. Szorenyi 75

3.2 The Peculiarities of Pulsed Laser Deposition 78

3.3 Pulsed Laser Deposition of Pure Carbon Forms 79

3.3.1 PLD of DLC in Vacuum 80

3.3.2 Ablation in Inert Gas Atmospheres: He, Ar, Xe 86

3.3.3 Ablation in Hydrogen and Oxygen Ambient 91

3.3.4 Production of Nanotubes 94

3.4 Pulsed Laser Deposition of Carbon Compounds - A Case Study of Carbon Nitride 95

Chapter 4 Fabrication of Micro-optics in Polymers and in UV Transparent Materials / G. Kopitkovas, L. Urech, T. Lippert 105

4.2 Laser Ablation of Polymers 107

4.2.1 Mechanisms and Models 107

4.2.2 Commercially Available and Designed Polymers 109

4.3 Methods for the Fabrication of Micro-optical Elements in Polymers 112

4.3.1 Laser Beam Writing 112

4.3.2 Fabrication of Micro-optics using Laser Ablation and Half Tone or Diffractive Gray Tone Masks 113

4.4 Microstructuring of UV Transparent Materials 117

4.4.1 Fabrication and Applications of Micro-optical Elements in Quartz 122

Chapter 5 Ultraviolet Laser Ablation of Polymers and the Role of Liquid Formation and Expulsion / S. Lazare, V. Tokarev 137

5.2 Polymers and Lasers: The Situation in 2005 139

5.3 From Ablation Curve to Ablation Recoil Pressure 140

5.4 Experimental 144

5.4.1 General Setup Designed for Laser Microdrilling 144

5.4.2 Precision Lens Projection Setup for Submicron Ablation 145

5.5 Microdrilling 146

5.5.1 Rate of Drilling and Stationary Profile with PET Example 147

5.5.2 Other Polymers 148

5.5.3 Search for the Optimum Aspect Ratio 151

5.5.4 Model 152

5.5.5 Mechanisms and Perspectives 157

5.5.6 Microdrilling Summary 159

5.6 Submicron Resolution 160

5.6.1 Two Beams Imaging Experiments by Filtering 160

5.6.2 Defocus Adjustment Experiments (3 Beams) 162

5.6.3 Discussion and Perspectives of Submicron Experiments 162

5.7 Viscous Microflow on Polymers Induced by Ablation 165

5.8 Phase Explosion and Formation of Nanofibers on PMMA 167

5.8.1 Possible Mechanisms 168

5.9 Comparison with Ablation of Metals (Titanium) 172

Chapter 6 Nanoscale Laser Processing and Micromachining of Biomaterials and Biological Components / D.B. Chrisey, S. Qadri, R. Modi, D.M. Bubb, A. Doraiswamy, T. Patz, R. Narayan 181

6.1.1 Nanotechnology in Biology and Medicine 182

6.1.2 Laser Material Interactions for Biological Materials 183

6.2 Nanoscale Laser Processing and Micromachining of Biomaterials and Biological Components 185

6.2.1 Matrix Assisted Pulsed Laser Deposition of Novel Drug Delivery Coatings 186

6.2.2 Resonant Infrared Pulsed Laser Deposition of Drug Delivery Coatings 189

6.2.3 Resonant Infrared Matrix Assisted Pulsed Laser Evaporation 192

6.2.4 Laser Micromachining of Differentially Adherent Substrate for Three-Dimensional Myoid Fabrication 195

6.2.5 Matrix Assisted Pulsed Laser Evaporation Direct Write Applied to the Fabrication of Three-Dimensional Tissue Constructs 199

Chapter 7 Direct Transfer and Microprinting of Functional Materials by Laser-Induced Forward Transfer / K.D. Kyrkis, A.A. Andreadaki, D.G. Papazoglou, I. Zergioti 213

7.1 Introduction to the Laser-Induced Transfer Methods 214

7.1.1 Overview of the Laser-Induced Forward Transfer Process 214

7.1.2 Laser Transfer Methods 219

7.2 Laser Microprinting for Electronics and Optoelectronics 220

7.2.1 Conventional Pattern Transfer Processes 220

7.2.2 Laser Printing for Electronics and Power Devices 221

7.2.3 Laser Printing for Organic Optoelectronics 225

7.3 Laser Printing of Biomaterials 228

7.4 Physics of the LIFT Method - Time-Resolved Imaging Diagnostics 231

7.5 Summary and Future Aspects 236

Chapter 8 Recent Progress in Direct Write 2D and 3D Photofabrication Techniques with Femtosecond Laser Pulses / J. Koch, T. Bauer, C. Reinhardt, B.N. Chichkov 243

8.1 Laser Photofabrication Technique/Introduction 243

8.1.1 Ablative Micro- and Nanostructuring with Femtosecond Laser Pulses 244

8.1.2 Two-Photon Polymerization (2PP) Technique 247

8.1.3 Multiphoton Activated Processing (MAP) 249

8.2 High-Resolution 2D Photofabrication Technique with Femtosecond Laser Pulses 251

8.3 Nanotexturing of Metals by Laser-Induced Melt Dynamics 255

8.4 Deep Drilling and Cutting with Ultrashort Laser Pulses 261

8.5 3D Photofabrication and Microstructuring 265

8.6 Application Examples 267

8.6.1 Plasmonics 267

8.6.2 Microfluidics 271

Chapter 9 Self-Organized Surface Nanostructuring by Femtosecond Laser Processing / J. Reif, F. Costache, M. Bestehorn 275

9.2 Classical Picture of Laser Induced Periodic Surface Structure (LIPSS) Formation 277

9.3 Typical Laser Induced Surface Nanostructures 278

9.4 Dynamics of Femtosecond Laser Ablation from Dielectrics and Semiconductors: Generation of Surface Instabilities 282

9.5 Self-Organized Pattern Formation from Instabilities: Femtosecond Laser Ablation and Ion Beam Erosion 284

Chapter 10 Three-Dimensional Micromachining with Femtosecond Laser Pulses / W. Watanabe, K. Itoh 291

10.2 Femtosecond Laser-Induced Refractive-Index Change 292

10.2.1 Induction of Refractive-Index Change 292

10.2.2 Fabrication of Waveguides 293

10.3 Refractive-Index Change by Filamentation 294

10.3.1 Filamentation 294

10.3.2 Induction of Refractive-Index Change 294

10.3.3 Waveguide and Coupler 296

10.3.4 Grating 299

10.3.5 Diffractive Lens 301

10.4 Void 303

10.4.1 Formation of Void 303

10.4.2 Binary Data Storage 304

10.4.3 Fresnel Zone Plate 305

10.5 Two-Beam Interference 306

10.5.1 Holographic Grating 306

10.5.2 Holographic Memory 308

10.6 Microchannel 309

Chapter 11 Laser Crystallization of Silicon Thin Films for Flat Panel Display Applications / A. T.

Voutsas 317

11.2 The Evolution in Poly-Si Crystallization Technology 319

11.2.1 Solid-Phase Crystallization (SPC) 320

11.2.2 Laser Crystallization Technology 322

11.3 Si Transformation by Laser Crystallization (LC) 328

11.3.1 Conventional LC 331

11.3.2 Advanced Lateral Growth (LC) Technology 333

11.3.3 Laterally Grown Poly-Si Microstructure 336

11.4 Characteristics of Advanced Poly-Si TFTs 357

11.4.1 Material-Quality to Device-Performance Correlation 360

11.4.2 Performance Predictions for Advanced Poly-Si TFTs 360

11.5 Remaining Challenges in Si Crystallization 369

Chapter 12 Long Pulse Excimer Laser Doping of Silicon and Silicon Carbide for High Precision Junction Fabrication / E. Fogarassy, J. Venturini 375

12.2 Laser Doping of Silicon 377

12.2.1 Introduction: CMOS Technology 377

12.2.2 Thermal Simulations 379

12.2.3 Laser Annealing of Implanted Silicon (Liquid and Solid Phase) 382

12.2.4 Laser Induced Diffusion from Spin-On Glass 396

12.3 Laser Doping of Silicon Carbide 400

12.3.2 Simulations 400

12.3.3 Experimental Conditions 401

12.3.4 Results 402

Chapter 13 Laser Cleaning: State of the Art / Ph. Delaporte, R. Oltra 411

13.1 Introduction to Laser Cleaning 411

13.1.1 Cleaning Processes 411

13.1.2 The Basic Laser Material Interaction of the Laser Cleaning Process 412

13.2 Mechanisms and Performances 414

13.2.1 Laser Removal of Particles 414

13.2.2 Laser Removal of Superficial Layers 420

13.3 Laser Cleaning Applications 424

13.3.1 Typical Laser Cleaning Setup 424

13.3.2 Microelectronic Industry 427

13.3.3 Nuclear Industry 429

13.3.4 Art Cleaning 431

13.4 Integration of Laser Cleaning in a Transformation Process 432

13.4.1 Surface Pre-treatment: PROTAL Process 432

13.4.2 Surface Preparation for Adhesion 433.

Notes:

"Published in association with European Materials Research Society."

Includes bibliographical references and index.

ISBN:

0080447279

OCLC:

69113589

Publisher Number:

9780080447278