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Micromachined thin-film sensors for SOI-CMOS co-integration / by J. Laconte, D. Flandre and J.P. Raskin.
LIBRA TK7872.T55 L33 2006
Available from offsite location
- Format:
- Book
- Author/Creator:
- Laconte, J. (Jean)
- Language:
- English
- Subjects (All):
- Gas flow.
- Thin film devices.
- Silicon-on-insulator technology.
- Metal oxide semiconductors, Complementary.
- Physical Description:
- xiii, 292 pages : illustrations ; 25 cm
- Place of Publication:
- Dordrecht : Springer, 2006.
- ISBN:
- 0387288422
- OCLC:
- 68079553
- Publisher Number:
- 9780387288420
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