MEMS/NEMS : handbook techniques and applications

MLA

Leondes, Cornelius T. and Rosengarten Family Fund. MEMS/NEMS : handbook techniques and applications. New York : Springer, [2006]

APA

Leondes, C. & Rosengarten Family Fund. (2006). MEMS/NEMS : handbook techniques and applications. New York : Springer.

Chicago

Leondes, Cornelius T. and Rosengarten Family Fund. MEMS/NEMS : handbook techniques and applications. New York : Springer, [2006]