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MEMS/NEMS : handbook techniques and applications / edited by Cornelius T. Leondes.

Van Pelt Library TK153 .M446 2006 v.1-5
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Format:
Contributor:
Language:
English
Subjects (All):
Physical Description:
5 volumes : illustrations ; 25 cm
Other Title:
MEMS/NEMS handbook
Place of Publication:
New York : Springer, [2006]
Contents:
  • v. 1. Design methods
  • v. 2. Fabrication techniques
  • v. 3. Manufacturing methods
  • v. 4. Sensors and actuators
  • v. 5. Medical applications and MOEMS.
Notes:
Includes bibliographical references and index.
Local Notes:
Acquired for the Penn Libraries with assistance from the Rosengarten Family Fund.
ISBN:
0387245200
OCLC:
57693094
Publisher Number:
9780387245201
Online:
The Rosengarten Family Fund Home Page

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