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MOEMS : micro-opto-electro-mechanical systems / Manouchehr E. Motamedi, editor.
Table of contents Available online
View onlineLIBRA TK7875 .M56 2005
Available from offsite location
- Format:
- Book
- Language:
- English
- Subjects (All):
- Microelectromechanical systems.
- Optoelectronic devices.
- Microfabrication.
- Physical Description:
- xxi, 614 pages : illustrations ; 27 cm
- Place of Publication:
- Bellingham, Wash. : SPIE Press--The International Society for Optical Engineering, [2005]
- Notes:
- Includes bibliographical references and index.
- Local Notes:
- Acquired for the Penn Libraries with assistance from the Class of 1953 Fund.
- ISBN:
- 0819450219
- OCLC:
- 56799174
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