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Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
LIBRA TK7874 .W635 1986 v.1-3
Available from offsite location
- Format:
- Book
- Author/Creator:
- Wolf, Stanley, 1943-
- Language:
- English
- Subjects (All):
- Integrated circuits--Very large scale integration.
- Integrated circuits.
- Silicon.
- Physical Description:
- volumes : illustrations ; 25 cm
- Place of Publication:
- Sunset Beach, Calif. : Lattice Press, c1986-
- Contents:
- v. 1. Process technology.
- v. 2. Process integration.
- v.3. The Submicron MOSFET.
- Notes:
- Includes bibliographies and index.
- ISBN:
- 0961672137
- OCLC:
- 14258223
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