ULSI semiconductor technology atlas / Chih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu.

Format:

Book

Author/Creator:

Tung, Chih-Hang, 1963-

Contributor:

Sheng, George T. T.

Lu, Chih-Yuan, 1950-

Language:

English

Subjects (All):

Integrated circuits--Ultra large scale integration--Atlases.

Integrated circuits.

Electron microscopy.

Integrated circuits--Ultra large scale integration.

Genre:

Atlases.

Physical Description:

xii, 666 pages : illustrations ; 27 cm

Place of Publication:

Hoboken, N.J. : Wiley-Interscience, [2003]

Summary:

The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems.

Contents:

1 Microelectronics and Microscopy 3

2 ULSI Process Technology 36

3 Applications of TEM for Construction Analysis 61

4 TEM Sample Preparation Techniques 90

5 Ion Implantation and Substrate Defects 143

6 Dielectrics and Isolation 179

7 Silicides, Polycide, and Salicide 256

8 Metallization and Interconnects 287

9 ULSI Devices I: DRAM Cell with Planar Capacitor 345

10 ULSI Devices II: DRAM Cell with Stacked Capacitor 365

11 ULSI Devices III: DRAM Cell with Trench Capacitor 399

12 ULSI Devices IV: SRAM 445

13 TEM in Failure Analysis 477

14 Novel Devices and Materials 526

15 TEM in Under Bump Metallization (UBM) and Advanced Electronics Packaging Technologies 558

16 High-Resolution TEM in Microelectronics 609.

Notes:

Includes bibliographical references and index.

ISBN:

0471457728

OCLC:

51983405

Online:

Publisher description