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Micromachines as tools for nanotechnology / H. Fujita (ed.)
LIBRA T174.7 .F85 2003
Available from offsite location
- Format:
- Book
- Series:
- Microtechnology and MEMS
- Language:
- English
- Subjects (All):
- Nanotechnology.
- Microelectromechanical systems.
- Physical Description:
- xii, 211 : illustrations ; 24 cm.
- Place of Publication:
- Berlin ; New York : Springer, 2003.
- Notes:
- Includes bibliographical references.
- ISBN:
- 354000856X
- OCLC:
- 51861936
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