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Ion implantation / edited by J. K. Hirvonen.
LIBRA TA403 .T74 v.18
Available from offsite location
- Format:
- Book
- Series:
- Treatise on materials science and technology ; v. 18.
- Treatise on materials science and technology ; v. 18
- Language:
- English
- Subjects (All):
- Ion implantation.
- Materials--Effect of radiation on.
- Materials.
- Physical Description:
- xiv, 502 pages : illustrations ; 24 cm.
- Place of Publication:
- New York : Academic Press, 1980.
- Notes:
- Includes bibliographies and index.
- ISBN:
- 0123418186
- OCLC:
- 5675945
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