Integration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A. / editors, Harry A. Atwater ... [and others].

Format:

Book

Conference/Event

Contributor:

Atwater, H. A. (Harry Albert), 1921-

Materials Research Society. Fall Meeting (2003 : San Francisco, California)

Alumni and Friends Memorial Book Fund.

Conference Name:

Symposium on Heterogeneous Thin-Film Materials and Devices (2003 : San Francisco, California)

Series:

Materials Research Society symposia proceedings ; v. 768.

Materials Research Society symposia proceedings

Language:

English

Subjects (All):

Thin films--Congresses.

Thin films.

Inhomogeneous materials--Congresses.

Inhomogeneous materials.

Thin film devices--Congresses.

Thin film devices.

Composite materials--Congresses.

Composite materials.

Genre:

Conference papers and proceedings.

Physical Description:

ix, 131 pages : illustrations ; 24 cm.

Other Title:

Heterogeneous thin-film materials and devices

Place of Publication:

Warrendale, Pennsylvania : Materials Research Society, [2003]

Contents:

Heterogeneous Integration and Wafer Bonding

Relaxation of SiGe Films for the Fabrication of Strained Si Devices / J.S. Maa, D.J. Tweet, J.J. Lee, S.T. Hsu, K. Fujii, T. Naka, T. Ueda, T. Baba, N. Awaya, K. Sakiyama 3

Free Standing Silicon as a Compliant Substrate for SiGe / G.M. Cohen, P.M. Mooney, J.O. Chu 9

Relaxed SiGe Layers With High Ge Content by Compliant Substrates / H. Yin, R.L. Peterson, K.D. Hobart, S.R. Shieh, T.S. Duffy, J.C. Sturm 15

Hybrid Valence Bands in Strained-Layer Heterostructures Grown on Relaxed SiGe Virtual Substrates / Minjoo L. Lee, Eugene A. Fitzgerald 21

Electrical and Structural Characterization of the Interface of Wafer Bonded InP/Si / A. Fontcuberta i Morral, J.M. Zahler, Harry A. Atwater, M.M. Frank, Y.J. Chabal, P. Ahrenkiel, M. Wanlass 27

Anisotropic Delamination Energy of Bonded Rippled Silicon Surfaces Created by Ar[superscript +] Bombardment / Z.X. Liu, N.W. Cheung 33

Transmission Electron Miscroscopy Study of the Fused Silicon/Diamond Interface / G.N. Yushin, S.D. Wolter, A.V. Kvit, R. Collazo, J.T. Prater, Z. Sitar 39

Determination of Space Shift of Si/SiGe/Si Heterojunction's Cap Layer by Grazing-Angle Incidence X-ray Backdiffraction Technique / Siranush E. Bezirganyan, Hayk H. Bezirganyan Jr., Hakob P. Bezirganyan, Petros H. Bezirganyan Jr. 45

Leakage Current and Dielectric Properties of Ba[subscript 0.5]Sr[subscript 0.5]TiO[subscript 3] Films Deposited by RF Sputtering at Low Substrate Temperature / Nicholas Cramer, Thottam S. Kalkur, Elliot Philofsky, Lee Kammerdiner 51

Integration of Porous Silicon With Sol-Gel Derived Ceramic Films / S. Stolyarova, B. Malic, S. Javoric, A. El-Bahar, M. Kosec, Y. Nemirovsky 57

Control of Crystal Orientations and Its Electrical Properties of PZT/Ru and PZT/RuO[subscript 2] Thin Films by MOCVD / Kazuo Shinozaki, Akinori Iwasaki, Naoki Wakiya, Nobuyasu Mizutani 63

CeO[subscript 2] Thin Films as Buffer Layers for Si/YBCO Integrated Microelectronics / Elena Tresso, V. Ballarini, A. Chiodoni, R. Gerbaldo, G. Ghigo, L. Gozzelino, E. Mezzetti, B. Minetti, C.F. Pirri, G. Tallarida, S. Ferrari, C. Camerlingo 69

Growth of C[subscript 60] Fullerene Films on Semiconductor Surfaces / Elena V. Basiuk, Jose G. Banuelos, Alejandro Esparza, Jose M. Saniger 75

Low Temperature Growth of GaAs on Si Substrates for Ultra-Fast Photoconductive Switches / Kai Ma, Ryohei Urata, David A.B. Miller, James S. Harris Jr. 81

Electrical Properties of Bi[subscript 3.25]La[subscript 0.75]Ti[subscript 3]O[subscript 12] Thin Films With Various Grain Orientations Deposited by RF Magnetron Sputtering / Ju Hyung Suh, Sang Ho Oh, Chan-Gyung Park 87

Laser Assisted Molecular Beam Deposition of Thin Films for Gate Dielectrics Applications / Robert L. DeLeon, James F. Garvey, Gary S. Tompa, Richard Moore, Harry Efstathiadis 93

Integrated Optoelectronics and Layer Transfer

Wafer Fusion of GaSb to GaAs / C.A. Wang, Z.L. Liau, D.A. Shiau, P.M. Nitishin 101

Optical and Crystallographic Studies of Ion-Implanted Relaxor Ferroelectric Lead Zinc Niobate for Single-Crystal Layer Transfer / M. Levy, P.D. Moran 107

Magneto-Optic Materials for Integrated Applications / Sang-Yeob Sung, Na-Hyoung Kim, Bethanie J.H. Stadler 111

Pixel-to-Point Transfer: A Process for Integrating Individual GaN-Based Light-Emitting Devices into Heterogeneous Microsystems / Z.S. Luo, T. Sands, N.W. Cheung, J.A. Chediak, J. Seo, L.P. Lee 117

Photo-Polymer Wafer Bonding for Double Layer Transfer / Vorrada Loryuenyong, Tim Sands, Nathan W. Cheung 123.

Notes:

"Symposium G, 'Integration of Heterogeneous Thin-Film Materials and Devices,' [was] held April 23-24 at the 2003 MRS Spring meeting in San Francisco, California ..."--P. ix.

Includes bibliographic references and indexes.

Local Notes:

Acquired for the Penn Libraries with assistance from the Alumni and Friends Memorial Book Fund.

ISBN:

1558997059

OCLC:

52937285