Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, USA / editors, David A. LaVan ... [and others].

Format:

Book

Contributor:

LaVan, David A.

Materials Research Society. Fall Meeting (2002 : Boston, Mass.)

Alumni and Friends Memorial Book Fund.

Series:

Materials Research Society symposia proceedings ; v. 741.

Materials Research Society symposia proceedings

Language:

English

Subjects (All):

Microelectromechanical systems--Congresses.

Microelectromechanical systems.

Nanotechnology--Congresses.

Nanotechnology.

Genre:

Conference papers and proceedings.

Physical Description:

xiii, 298 pages : illustrations ; 24 cm.

Place of Publication:

Warrendale, Pa. : Materials Research Society, [2003]

Contents:

Micro and Nano Fluidics

Mesoscale Thin Film Actuator for Promoting Fluid Motion in Microfluidic and Nanofluidic Channels / Daniel J. Sadler, Gaurav Singh, Frederic Zenhausern, Ravi F. Saraf 3

Dynamic Tuning of Optical Waveguides With Electrowetting Pumps / Francesco Cattaneo, Peter Mach, Jennifer Hsieh, Tom Krupenkin, Shu Yang, John A. Rogers 9

Nanotechnology and Molecular Machines I

Characterization of the Mechanical Properties of MEMS Devices Using Nanoscale Techniques / Nicholas X. Randall, Richard A.J. Soden 17

Microreactors for Thin-Film Calorimetry / J. Rodriguez-Viejo, M. Chacon, A.F. Lopeandia, M.T. Clavaguera-Mora, Leonel R. Arana, K.F. Jensen 27

Mechanical Properties and Characterization I

Development of Fatigue Pre-Cracking Method Into Micro-Sized Specimens for Measuring Fracture Toughness / K. Takashima, S. Koyama, K. Nakai, Y. Higo 35

Surface Oxide Effects on Static Fatigue of Polysilicon MEMS / H. Kahn, R. Ballarini, A.H. Heuer 41

Interfacial Effects on the Premature Failure of Polycrystalline Silicon Structural Films / C.L. Muhlstein, E.A. Stach, R.O. Ritchie 47

High Temperature Behavior of Polysilicon / Chung-Seog Oh, George Coles, William N. Sharpe Jr. 53

Alternative Micro- and Nano-Fabrication Techniques I

Pulsed Laser Annealing of Silicon-Germanium Films / Sherif Sedky, Jeremy Schroeder, Timothy Sands, Roger Howe, Tsu-Jae King 61

Growth of Polycrystalline Silicon Carbide on Thin Polysilicon Sacrificial Layers for Surface Micromachining Applications / R.F. Wiser, J. Chung, M. Mehregany, C.A. Zorman 67

Fabrication of Micro-Relief Structures in Thick Resist for Anti-Counterfeiting Applications / Patrick W. Leech, Henning Zeidler 73

Selective Titanium Oxide Formation Using Electron-Beam Induced Carbon Deposition Technique / Thierry Djenizian, Jan Macak, Patrik Schmuki 79

Fabrication of Flat RF MEMS Switch Membrane by Minimizing of Stress Gradients in the Au Membrane Structure / Jong-Seok Kim, Hoon Song, Jin Woo Cho, Eun Sung Lee, Sun Hee Park, Mun Chul Lee, Dong Hwa Shim, In Sang Song, Jung Woo Kim, Seok Jin Kang, Ki Moo Song 87

Design and Performance of a Microengine Realized With Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators / Edward S. Kolesar, Matthew D. Ruff, William E. Odom, Joseph A. Jayachandran, Justin B. McAllister, Simon Y. Ko, Jeffery T. Howard, Peter B. Allen, Josh M. Wilken, Noah C. Boydston, Jorge E. Bosch, Richard J. Wilks 93

Investigation of Polymer Micro-Actuators Based on Electrostrictive Poly(vinylidene fluoride-trifluoroethylene) Copolymers / Tian-bing Xu, Feng Xia, Z.-Y. Cheng, Q.M. Zhang 99

Nonuniformity in Selective Anodization of Silicon and Its Application to Micro-Tip Fabrication / S. Uehara, N. Negishi, T. Matsubara 105

Fabrication of Micromachined Piezoelectric Diaphragm Pumps Actuated by Interdigitated Transducer Electrodes / Eunki Hong, S.V. Krishnaswamy, T.T. Braggins, C.B. Freidhoff, S. Trolier-McKinstry 111

Stress Adjustment and Characteristics Improvement in a 1.8GHz Range Film Bulk Acoustic Wave Resonator by Using Multi-Layer Structure of ZnO/Al[subscript 2]O[subscript 3]/SiO[subscript 2] / Masaki Takeuchi, Hajime Yamada, Hideki Kawamura, Yoshihiko Goto, Tadashi Nomura, Hiroyuki Fujino, Yukio Yoshino, Takahiro Makino, Seiichi Arai 117

Hybrid Integration of III-V Optoelectronic Devices on Si Platform Using BCB / Alex Katsnelson, Vadim Tokranov, Michael Yakimov, Matthew Lamberti, Serge Oktyabrsky 123

Aluminum Nitride Chip Carrier for Micro-Electro-Mechanical Sensor Applications / T.F. Marinis, J.W. Soucy 129

Controlling Casimir Forces in MEMS and NEMS / R. Esquivel-Sirvent, C. Villarreal 135

Tailoring of Stress Development in MEMS Packaging Systems / Satyajit S. Walwadkar, Junghyun Cho, P.W. Farrell, Lawrence E. Felton 139

Defect-Induced Shifts in the Elastic Constants of Silicon / Clark L. Allred, Jeffrey T. Borenstein, Marc S. Weinberg, Xianglong Yuan, Martin Z. Bazant, Linn W. Hobbs 145

Manufacturing of 3-D Microstructures Using Novel UPSAMS Process for MEMS Applications / Andre Sharon, Axel Bilsing, Gordon Lewis, Xin Zhang 151

Strain Gradient Effect in Cone Indentation / Anthony A. DiCarlo, Henry T.Y. Yang, Srinivasan Chandrasekar 157

Residual Stress Control to Optimize PZT MEMS Performance / M.S. Kennedy, D.F. Bahr, C.D. Richards, R.F. Richards 163

Process Development and Integration of Piezoelectric Aluminum Nitride Thin-Film for RF MEMS Applications / Rajnish K. Sharma, Jiang Ning, Feng Hanhua, R. Gopalakrishnan 169

Modeling of a Rotaxane-Based Molecular Device / Xiange Zheng, Karl Sohlberg 177

Molecular Electronics

Self-Aligned Split Gate Electrodes Fabricated on Suspended Carbon Nanotubes / S.-B. Lee, L.A.W. Robinson, K.B.K. Teo, M. Chhowalla, G.A.J. Amaratunga, W.I. Milne, D.G. Hasko, H. Ahmed 185

Semi-Empirical Study of a pH-Switchable [2] Rotaxane / Laura Frankfort, Karl Sohlberg 191

Nanotechnology and Molecular Machines II

Focused Ion Beam Nano-Machined Structures for Strain Analysis by a Moire Technique / Biao Li, Huimin Xie, Xin Zhang 199

Alignment and Deposition of Single Wall Carbon Nanotubes Under the Influence of an Electric Field / Paul Jaynes, Thomas Tiano, Margaret Roylance, Charles Carey, Kenneth McElrath 205

Mechanical Properties and Characterization II

Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications / H.D. Espinosa, B. Peng, K.-H. Kim, B.C. Prorok, N. Moldovan, X.C. Xiao, J.E. Gerbi, J. Birrell, O. Auciello, J.A. Carlisle, D.M. Gruen, D.C. Mancini 213

Microscale Measurement of Stresses in a Silicon Flexure Using Raman Spectroscopy / V.T. Srikar, A.K. Swan, B.B. Goldberg, M.S. Unlu, S.M. Spearing 219

Alternative Micro- and Nano-Fabrication Techniques II

The Development of Alternative Molds for Micromolding / Terry Garino, Joseph Cesarano, Alfredo Morales 227

The Improvement of Temperature Coefficient of Frequency in Thin Film Bulk Acoustic Wave Resonator Using Secondary Harmonics / Yukio Yoshino, Masaki Takeuchi, Hajime Yamada, Yoshihiko Goto, Tadashi Nomura, Takahiro Makino, Seiichi Arai 233

Micromolding of Pb and Zn With Surface Engineered LiGA Mold Inserts / D.M. Cao, D.J. Guidry, W.J. Meng, K.W. Kelly 239

Biotechnology and Biocompatibility

A Chemical Sensor Using Neurons and a 3-D Micro-Fluidic Chip / H. McNally, H. Kufluoglu, D. Akin, J. Grimmer, J. Walker, R. Shi, R. Borgens, R. Bashir 247

Applied Micro- and Nano-Technology

Vibrating RF MEMS for Low Power Communications / Clark T.-C. Nguyen 255

Modeling Combined Thermal, Electrical, Optical and Mechanical Response for MEMS Spectroscopic Gas Sensor Based on Photonic Crystals / Anton C. Greenwald, Martin U. Pralle, Mark P. McNeal, Nicholas Moelders, Irina Puscasu, James T. Daly, Edward A. Johnson 267

Piezoelectric Micromachined Ultrasonic Transducers Based on PZT Films / Jacek Baborowski, Nicolas Ledermann, Paul Muralt 273

Surface Engineering Issues in MEMS Structures and Devices

A Comparative Microtribological Investigation of Diamond-Like Carbon Films for Applications in Microsystems / S. Imad-Uddin Ahmed, Giuseppe Bregliozzi, Henry Haefke 281

Planar Extrinsic Biasing of Thin Film Shape-Memory MEMS Actuators / D.S. Grummon, R. Gotthardt, T. LaGrange 287.

Notes:

Includes bibliographical references and index.

Local Notes:

Acquired for the Penn Libraries with assistance from the Alumni and Friends Memorial Book Fund.

ISBN:

1558996788

OCLC:

52534262