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The production of epitaxial silicon wafers via plasma enhanced chemical vapor deposition / David A. Brass, Aaron G. Lee.
LIBRA TP155 .C5465 03-1
Available from offsite location
- Format:
- Book
- Author/Creator:
- Brass, David A.
- Series:
- Chemical engineering senior design project ; 03-1.
- Chemical engineering senior design project ; 03-1
- Language:
- English
- Physical Description:
- 189 pages : illustrations ; 29 cm.
- Place of Publication:
- [Place of publication not identified] : [publisher not identified], 2003.
- Notes:
- Advisor: Professor Talid R. Sinno.
- Consultant: Talid R. Sinno, University of Pennsylvania.
- Includes bibliographical references.
- OCLC:
- 249381801
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