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Process technology for silicon carbide devices / edited by Carl-Mikael Zetterling.
LIBRA TK7871.15.S55 P724 2002
Available from offsite location
- Format:
- Book
- Series:
- EMIS processing series ; no. 2.
- EMIS processing series ; no. 2
- Language:
- English
- Subjects (All):
- Silicon carbide--Electric properties.
- Silicon carbide.
- Physical Description:
- xxii, 176 pages : illustrations ; 26 cm.
- Place of Publication:
- London : INSPEC, [2002]
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0852969988
- OCLC:
- 48884859
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