Microfluidics and biomems applications / edited by Francis E.H. Tay.

Format:

Book

Contributor:

Tay, Francis E. H.

Rosengarten Family Fund.

Series:

Microsystems (Series) ; v. 10.

Microsystems ; v. 10

Language:

English

Subjects (All):

Fluidic devices.

Micromechanics.

Physical Description:

xxi, 336 pages : illustrations ; 25 cm.

Place of Publication:

Boston : Kluwer Academic Publishers, [2002]

Summary:

Microfluidics and BioMEMS Applications central idea is on microfluidics, a relatively new research field which finds its niche in biomedical devices, especially on lab-on-a-chip and related products. Being the essential component in providing driving fluidic flows, an example of micropump is chosen to illustrate a complete cycle in development of microfluidic devices which include literature review, designing and modelling, fabrication and testing. A few articles are included to demonstrate the idea of tackling this research problem, and they cover the main development scope discussed earlier as well as other advanced modelling schemes for microfluidics and beyond.

Scientists and students working in the areas of MEMS and microfluidics will benefit from this book, which may serve both communities as both a reference monograph and a textbook for courses in numerical simulation, and design and development of microfluidic devices.

Contents:

Chapter 1 Literature Review for Micropumps 3

1.1 Origins of Micropump Research 3

1.2 Mechanical Micropumps 5

1.2.1 Reciprocating Micropumps 8

1.2.1.1 Piezoelectric Actuation 9

1.2.1.2 Thermo-pneumatic Actuation 10

1.2.1.3 Electrostatic Actuation 11

1.2.1.4 Pneumatic Actuation 12

1.2.1.5 Shape Memory Alloy (SMA) Actuation 13

1.2.2 Peristaltic Micropumps 14

1.2.2.1 Piezoelectric Actuation 15

1.2.2.2 Thermo-pneumatic Actuation 15

1.2.3 Reciprocating Micropumps With Dynamic Micro-valves 16

1.3 Non-mechanical Micropumps 18

1.3.1 Electro-hydrodynamic (EHD) Micropumps 18

1.3.1.1 DC-charge injection EHD micropump 18

1.3.1.2 Travelling wave voltage EHD micropump 19

1.3.2 Electro-osmotic Micropumps 20

1.3.3 Ultrasonic Micropumps 21

1.3.4 Magneto-hydrodynamic (MHD) Micropumps 22

1.4 Motivation 23

Chapter 2 Design Rules for Micropumps 25

2.1 Preliminary Design 25

2.1.1 Piezoelectric Actuation 26

2.2 Compression Ratio 29

2.2.1 Determination of Volume Stroke 30

2.2.1.1 Analytical Model 31

2.2.1.2 Finite Element Model 35

2.2.2 Determination of Dead Volume 42

2.2.3 Determination of Compression Ratio 43

2.3 Criterion for Switching of Valve 43

2.3.1 Surface Energy Consideration 44

2.3.2 Elasto-mechanical Consideration 46

2.4 Criterion for Self-priming Capability 48

2.5 Criterion for Bubble Tolerance 50

Chapter 3 Modelling and Simulation 53

3.1 Background of Microfluidics Systems Modelling 53

3.2 Governing Equation for Micro-pumps 54

3.3 Modelling of the Actuator Unit 57

3.4 Modelling of the Inlet Valve 61

3.5 Modelling of the Outlet Valve 64

3.6 System Model of Proposed Micro-pump 65

Chapter 4 Process Development and Fabrication 69

4.1 Bulk Silicon Micromachining 70

4.1.1 Photolithography 70

4.1.2 Thin Film Deposition 72

4.1.2.1 Oxidation of Silicon 72

4.1.2.2 Low Pressure Chemical Vapour Deposition of Silicon Nitride 74

4.1.3 Wet Etching 74

4.1.3.1 Concave Mask Geometry 76

4.1.3.2 Convex Mask Geometry 78

4.1.4 Dry Etching 81

4.2 Process Flow 82

4.2.1 Silicon Process 82

4.2.2 Glass Process For Top Glass Wafer 92

4.2.3 Glass Process For Bottom Glass Wafer 93

4.2.4 Wafer Bonding 95

Chapter 5 Verification and Testing 101

5.1 Experimental Set-up 101

5.2 Piezoelectric Actuator Unit Model Verification 104

5.2.1 Analytical Model Verification 104

5.2.2 FEM Model Verification 107

5.3 Preliminary Functional Tests 109

Chapter 6 Development of Integrated Microfluidic Devices for Genetic Analysis / Robin H. Liu, Piotr Grodzinski 143

Chapter 7 Microfluidic Devices on Printed Circuit Board / Stefan Richter, Nam-Trung Nguyen, Ansgar Wego, Lienhard Pagel 185

Chapter 8 Nano and Micro Channel Flows of Bio-Molecular Suspension / Fan Xijun, Nhan Phan-Thien, Ng Teng Yong, Wu Xuhong, Xu Diao 219

Chapter 9 Transport of Liquid in Rectangular Micro-Channels by Electroosmotic Pumping / Chun Yang 265

Chapter 10 A Development of Slip Model and Slip-Corrected Reynolds Equation for Gas Lubrication in Magnetic Storage Device / Eddie Yin-Kwee Ng, Ningyu Liu, Xiaohai Mao 287

Chapter 11 Short Notes on Particle Image Velocimetry for Micro/Nano Fluidic Measurements / Chee Yen Lim, Francis E. H. Tay 307.

Notes:

Includes bibliographical references and index.

Local Notes:

Acquired for the Penn Libraries with assistance from the Rosengarten Family Fund.

ISBN:

1402072376

OCLC:

50725090