Radiation effects in advanced semiconductor materials and devices / C. Claeys, E. Simoen.

Format:

Book

Author/Creator:

Claeys, Cor L.

Contributor:

Simoen, E. (Eddy)

Series:

Springer series in materials science ; v. 57.

Springer series in materials science, 0933-033X ; 57

Language:

English

Subjects (All):

Semiconductors--Effect of radiation on.

Semiconductors.

Physical Description:

xxii, 401 pages : illustrations ; 25 cm.

Place of Publication:

Berlin ; New York : Springer, [2002]

Summary:

As microprocessors shrink in size, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on an increasing number of processing steps that involve a perilous environment where inadvertent radiation damage can occur. This book is aimed at researchers seeking an overview of the field and nuclear, space, and process engineers. Background knowledge of semiconductor and device physics is assumed, but the basic concepts are all concisely summarized.

Notes:

Includes bibliographical references (pages [351]-401).

ISBN:

3540433937

OCLC:

50269785