1 option
The physics of microfabrication / Ivor Brodie and Julius J. Muray.
LIBRA TK7874 .B73 1982
Available from offsite location
- Format:
- Book
- Author/Creator:
- Brodie, Ivor.
- Language:
- English
- Subjects (All):
- Microelectronics.
- Thin-film circuits.
- Physical Description:
- xix, 503 pages : illustrations ; 24 cm
- Place of Publication:
- New York : Plenum Press, [1982]
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0306408635
- OCLC:
- 8282885
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.