1 option
Fine line lithography / edited by Roger Newman.
LIBRA TK7874 .F56
Available from offsite location
- Format:
- Book
- Series:
- Materials processing, theory and practices ; v. 1.
- Materials processing, theory and practices ; v. 1
- Language:
- English
- Subjects (All):
- Integrated circuits--Large scale integration.
- Integrated circuits.
- Lithography.
- Physical Description:
- vii, 481 pages ; 23 cm.
- Place of Publication:
- Amsterdam ; New York : North-Holland Pub. Co. ; New York : sole distributor for the USA and Canada, Elsevier North-Holland, 1980.
- Notes:
- Includes bibliographies and index.
- ISBN:
- 0444853510
- OCLC:
- 6194916
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