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Microsystem design / Stephen D. Senturia.
LIBRA TK7875 .S46 2001
Available from offsite location
- Format:
- Book
- Author/Creator:
- Senturia, Stephen D., 1940-
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Design and construction.
- Microelectromechanical systems.
- System design.
- Microelectronics.
- Physical Description:
- xxvi, 689 pages : illustrations ; 24 cm
- Place of Publication:
- Boston : Kluwer Academic Publishers, 2001.
- Notes:
- Includes bibliographical references (pages [665]-676) and index.
- ISBN:
- 0792372468
- OCLC:
- 45086966
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