Handbook of silicon semiconductor metrology / edited by Alain C. Diebold.

Format:

Book

Contributor:

Diebold, A. C. (Alain C.)

Language:

English

Subjects (All):

Semiconductors--Measurement.

Semiconductors.

Semiconductors--Inspection.

Physical Description:

xvi, 874 pages : illustrations ; 27 cm

Place of Publication:

New York : Marcel Dekker, [2001]

Summary:

A description of cleanroom-based measurement technology used during the manufacture of silicon integrated circuits. It covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. It surveys key areas such as optical measurements and in-line calibration methods.

Contents:

1. Silicon Semiconductor Metrology / Alain C. Diebold 1

Transistor Fabrication Metrology

2. Gate Dielectric Metrology / Clive Hayzelden 17

3. Metrology for Ion Implantation / Lawrence A. Larson 49

4. MOS Device Characterization / Eric M. Vogel, Veena Misra 59

5. Carrier Illumination Characterization of Ultra-Shallow Implants / Peter Borden, Laurie Bechtler, Karen Lingel, Regina Nijmeijer 97

6. Modeling of Statistical Manufacturing Sensitivity and of Process Control and Metrology Requirements for a 0.18-[mu]m NMOSFET / Peter M. Zeitzoff 117

On-Chip Interconnect Metrology

7. Overview of Metrology for On-Chip Interconnect / Alain C. Diebold 143

8. Metrology for On-Chip Interconnect Dielectrics / Alain C. Diebold, William W. Chism, Thaddeus G. Dziura, Ayman Kanan 149

9. Thin-Film Metrology Using Impulsive Stimulated Thermal Scattering (ISTS) / Michael Gostein, Matthew Banet, Michael A. Joffe, Alex A. Mazney, Robin Sacco, John A. Rogers, Keith A. Nelson 167

10. Metal Interconnect Process Control Using Picosecond Ultrasonics / Alain C. Diebold, Robert Stoner 197

11. Sheet Resistance Measurements of Interconnect Films / Walter H. Johnson 215

12. Characterization of Low-Dielectric Constant Materials / Michael Kiene, Michael Morgen, Jie-Hua Zhao, Chuan Hu, Taiheui Cho, Paul S. Ho 245

13. High-Resolution Profilometry for CMP and Etch Metrology / Anna Mathai, Clive Hayzelden 279

Lithography Metrology

14. Critical-Dimension Metrology and the Scanning Electron Microscope / Michael T. Postek, Andras E. Vladar 295

15. Scanned Probe Microscope Dimensional Metrology / Herschel M. Marchman, Joseph E. Griffith 335

16. Electrical CD Metrology and Related Reference Materials / Michael W. Cresswell, Richard A. Allen 377

17. Metrology of Image Placement / Alexander Starikov 411

18. Scatterometry for Semiconductor Metrology / Christopher J. Raymond 477

Defect Detection and Characterization

19. Unpatterned Wafer Defect Detection / Po-Fu Huang, Yuri S. Uritsky, C. R. Brundle 515

20. Particle and Defect Characterization / C. R. Brundle, Yuri S. Uritsky 547

21. Calibration of Particle Detection Systems / John C. Stover 583

Sensor-Based Metrology

22. In Situ Metrology / Gabriel G. Barna, Bradley Van Eck, Jimmy W. Hosch 601

Data Management

23. Metrology Data Management and Information Systems / Kenneth W. Tobin, Jr., Leonard Neiberg 679

Electrical Measurement-Based Statistical Metrology

24. Statistical Metrology, with Applications to Interconnect and Yield Modeling / Duane S. Boning 705

Overviews of Key Measurement and Calibration Technology

25. Physics of Optical Metrology of Silicon-Based Semiconductor Devices / Gerald E. Jellison, Jr. 723

26. Ultraviolet, Vacuum Ultraviolet, and Extreme Ultraviolet Spectroscopic Reflectometry and Ellipsometry / J. L. Stehle, P. Boher, C. Defranoux, P. Evrard, J. P. Piel 761

27. Analysis of Thin-Layer Structures by X-Ray Reflectometry / Richard D. Deslattes, Richard J. Matyi 789

28. Ion Beam Methods / Wolf-Hartmut Schulte, Brett Busch, Eric Garfunkel, Torgny Gustafsson 811

29. Electron Microscopy-Based Measurement of Feature Thickness and Calibration of Reference Materials / Alain C. Diebold 851

30. Status of Lithography Metrology as of the End of 2000 / Alain C. Diebold 865.

Notes:

Includes bibliographical references and index.

ISBN:

0824705068

OCLC:

46822335