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Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 / editors, David G. Seiler ... [and others].
LIBRA TK7874.76 .C49 2001 1 v. + disk
Available from offsite location
- Format:
- Book
- Conference/Event
- Conference Name:
- International Conference on Characterization and Metrology for ULSI Technology (2000 : Gaithersburg, Md.)
- Series:
- AIP conference proceedings ; no. 550.
- AIP conference proceedings, 0094-243x ; 550
- Language:
- English
- Subjects (All):
- Integrated circuits--Ultra large scale integration--Congresses.
- Integrated circuits.
- Integrated circuits--Ultra large scale integration--Congresses--Software.
- Integrated circuits--Ultra large scale integration.
- Genre:
- Software.
- Conference papers and proceedings.
- Physical Description:
- xv, 708 pages : illustrations ; 28 cm + 1 computer optical disk (4 3/4 in.)
- Place of Publication:
- Melville, NY : American Institute of Physics, 2001.
- System Details:
- text file
- Notes:
- "The 2000 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology (NIST) from June 26 through June 29, 2000."--Pref.
- Includes bibliographical references and indexes.
- ISBN:
- 156396967X
- 1563969793
- OCLC:
- 50660126
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