Microstereolithography and other fabrication techniques for 3D MEMS / Vijay K. Varadan, Xiaoning Jiang, and Vasundara V. Varadan.

Format:

Book

Author/Creator:

Varadan, V. K., 1943-

Contributor:

Jiang, Xiaoning.

Varadan, V. V., 1948-

Class of 1924 Book Fund.

Language:

English

Subjects (All):

Microelectromechanical systems--Design and construction.

Microelectromechanical systems.

Microlithography.

Three-dimensional display systems.

Physical Description:

xiii, 260 pages : illustrations ; 24 cm

Place of Publication:

Chichester [England] ; New York : J. Wiley, [2001]

Contents:

1 Microelectromechanical Systems 1

1.2 Microfabrications for MEMS 4

1.2.1 Bulk Micromachining of Silicon 5

1.2.2 Surface Micromachining of Silicon 8

1.2.3 Wafer Bonding for MEMS 10

1.2.4 LIGA Process 13

1.2.5 Micromachining of Polymeric MEMS Devices 13

1.2.6 3D Microfabrications 17

1.3 Microsensing and Microactuation for MEMS 19

1.3.1 Sensing Mechanisms 19

1.3.2 Microactuation 27

1.4 Materials for MEMS 32

1.4.1 Metal and Metal Alloys for MEMS 32

1.4.2 Polymer for MEMS 33

1.4.3 Other Materials for MEMS 34

1.5 Smart Electronics and Conformal Antennas 35

1.6 Wireless Telemetry Systems 40

1.7 Scope of This Book 43

2 Fundamentals of Polymer Synthesis for MEMS 51

2.2 Classification of Polymers 52

2.2.1 Linear, Branched, and Cross-Linked Polymers (Based on Structure) 52

2.2.2 Thermoplastic and Thermosetting Polymers (Based on Physical Properties) 53

2.2.3 Plastics, Elastomers, Fibers and Liquid Resins (Based on End Use) 53

2.2.4 Chain and Step-growth Polymerization (Based on the Method of Synthesis) 54

2.3 UV Radiation Curing 61

2.3.1 Relationship between Wavelength and Radiation Energy 61

2.3.2 Mechanisms of UV Curing 63

2.3.3 Basic Kinetics of Photopolymerization 65

2.4 UV Curing with Pigmentation 68

2.5 UV Light Sources 78

3 Stereolithography (SL) 81

3.1.1 Stereolithography (SL) 82

3.1.2 Selective Laser Sintering 83

3.1.3 Laminated Object Manufacturing (LOM) 84

3.1.4 Fused Deposition Modeling (FDM) 86

3.1.5 Rapid Prototyping for 3D Microfabrication 87

3.2 Photopolymerization in SL 88

3.3 SL System 97

3.3.1 CAD Design 97

3.3.2 Layer Preparation 100

3.3.3 Imaging System 101

3.4 Microstereolithography (MSL) 103

3.4.1 History of MSL 103

3.4.2 Comparison Between MSL and SL 105

4 Microstereolithography Techniques I-Scanning Method 111

4.1 Classical MSL 111

4.2 IH Series Processes 113

4.2.1 IH Process 113

4.2.2 Mass-IH Process 116

4.2.3 Super-IH Process 117

4.3 Two Photon MSL 121

4.4 Other MSL Approaches 125

5 Microstereolithography Techniques II-Projection Method 129

5.2 Real Mask Projection MSL 129

5.3 Dynamic Mask Projection MSL 132

6 Polymeric MEMS Architecture with Silicon, Metal, and Ceramics 139

6.1 Burnout and Sintering 139

6.2 Electroplating 142

6.2.1 Electroplating Fundamentals 142

6.2.2 Microelectroplating 145

6.3 Ceramic MSL 147

6.4 Metallic Microstructures 151

6.4.1 Spatial Forming 152

6.4.2 EFAB Process 153

6.4.3 Localized Electrochemical Deposition 156

6.5 Metal-Polymer Microstructures 161

7 Combined Silicon and Polymeric Structures 165

7.1 Architecture Combination by Photoforming Process 165

7.2 MSL Integrated with Thick Film Lithography 168

7.3 AMANDA Process 170

8 Micromolding 173

8.2 Micromold Inserts 175

8.2.1 Polymer Micromold Inserts 175

8.2.2 Metal Micromold Inserts 176

8.2.3 Silicon Micromold Inserts 178

8.3 Micromolding Processes 179

8.3.1 Microinjection Molding 179

8.3.2 Microphotomolding 184

8.3.3 Microhot Embossing 184

8.3.4 Microtransfer Molding 187

8.3.5 Micromolding in Capillaries (MIMIC) 188

8.3.6 Jet Molding 193

9 Applications 197

9.1 Active MEMS Devices 197

9.1.1 Microvalves 197

9.1.2 Micropumps 201

9.1.3 SMA microactuator 206

9.2 Passive MEMS Devices 208

9.2.1 Pressure Transducer 209

9.2.2 Flowmeter 212

9.2.3 Passive Biomicrodevices 213

9.3 Implementation of 3D Microsystem 232

9.3.1 Passive Biochips for a Microsystem 233

9.3.2 Active Biochips 235

9.3.3 Experiments 238

Appendix 1 Some Polymers for MEMS 243

Appendix 2 An Example of CAD Model and NC Codes for Microstereolithography 247.

Notes:

Includes bibliographical references and index.

Local Notes:

Acquired for the Penn Libraries with assistance from the Class of 1924 Book Fund.

ISBN:

047152185X

OCLC:

45700297