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Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A. / editors, Douglas B. Chrisey ... [and others].
LIBRA TK7871 .M37 2001
Available from offsite location
- Format:
- Book
- Series:
- Materials Research Society symposia proceedings ; v. 624.
- Materials Research Society symposia proceedings
- Language:
- English
- Subjects (All):
- Electronics--Materials--Congresses.
- Electronics.
- Electronics--Materials.
- Microlithography--Materials--Congresses.
- Microlithography.
- Microlithography--Materials.
- Integrated circuits--Materials--Congresses.
- Integrated circuits.
- Integrated circuits--Materials.
- Masks (Electronics)--Materials--Congresses.
- Masks (Electronics).
- Microfabrication--Congresses.
- Microfabrication.
- Lasers--Industrial applications--Congresses.
- Lasers.
- Lasers--Industrial applications.
- Materials.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xiv, 283 pages : illustrations ; 24 cm.
- Place of Publication:
- Warrendale, Pa. : Materials Research Society, [2001]
- Notes:
- Includes bibliographical references and indexes.
- ISBN:
- 1558995323
- OCLC:
- 45329183
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