Thin-films : stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A. / editors, Richard Vinci ... [and others].

Format:

Book

Conference/Event

Contributor:

Vinci, Richard.

Materials Research Society.

Materials Research Society. Fall Meeting (1999 : Boston, Mass.)

Class of 1932 Fund.

Conference Name:

Symposium on Thin Films--Stresses and Mechanical Properties (8th : 1999 : Boston, Massachusetts)

Series:

Materials Research Society symposia proceedings ; v. 594.

Materials Research Society symposia proceedings

Language:

English

Subjects (All):

Thin films--Mechanical properties--Congresses.

Thin films.

Thin films--Mechanical properties.

Genre:

Conference papers and proceedings.

Physical Description:

xvii, 543 pages : illustrations ; 24 cm.

Place of Publication:

Warrendale, Pennsylvania : Materials Research Society, [2000]

Contents:

Multilayer Thin Films

Stress in Spin Valve Multilayers During Antiferromagnetic Phase Transformation / B.J. Daniels, S.P. Bozeman, H. Ha 3

The Microstructure and Nanoindentation Behavior of TiN/NbN Multilayers / J.M. Molina-Aldareguia, S.J. Lloyd, Z.H. Barber, M.G. Blamire, W.J. Clegg 9

Influence of Nanometer-Scale Multilayered Thin Films on Fatigue Crack Initiation / M.R. Stoudt, R.C. Cammarata, R.E. Ricker 15

Processing, Microstructure, and Fracture Behavior of Nickel/Nickel Aluminide Multilayered Thin Films / R. Banerjee, J.P. Fain, G.B. Thompson, P.M. Anderson, H.L. Fraser 19

Nanoindentation Study of Amorphous Metal Multilayered Thin Films / J.B. Vella, R.C. Cammarata, T.P. Weihs, C.L. Chien, A.B. Mann, H. Kung 25

Thermal Shock Behavior of Thin Bi-Material Ceramic Systems / E.P. Busso, Y.V. Tkach, R.P. Travis 31

Ion Implantation and Misfit Dislocation Formation in p/p+ Silicon / Petra Feichtinger, Hiroaki Fukuto, Rajinder Sandhu, Benjamin Poust, Mark S. Goorsky 37

Effect of Annealing on Microstructure and Properties of Al-Ti Multilayered Films / R. Mitra, A. Madan, R.A. Hoffman, W.A. Chiou, J.R. Weertman 43

Metallic Thin Films

Wafer Curvature Studies of Strengthening Mechanisms in Thin Films on Substrates / O.S. Leung, W.D. Nix 51

Activation Volume for Inelastic Deformation in Polycrystalline Ag Films at Low Temperatures / Mauro J. Kobrinsky, Carl V. Thompson 57

Mechanical Properties of Electroplated Copper Thin Films / R. Spolenak, C.A. Volkert, K. Takahashi, S. Fiorillo, J. Miner, W.L. Brown 63

Hall-Petch Hardening in Pulsed Laser Deposited Nickel and Copper Thin Films / J.A. Knapp, D.M. Follsteadt, J.C. Banks, S.M. Myers 69

Hydrogen Induced Plastic Deformation of Thin Films / A. Pundt, U. Laudahn, U. v. Hulsen, U. Geyer, T. Wagner, M. Getzlaff, M. Bode, R. Wiesendanger, R. Kirchheim 75

Plasticity in Copper Thin Films / V. Weihnacht, W. Bruckner 87

Strain Relaxation in Thin Films: The Effect of Dislocation Blocking / Peter J. Goodhew 93

Relation Between Macro- and Microstress in Thin Metallic Layers / Leon J. Seijbel, Rob Delhez 99

Influence of the Deposition Parameters on the Electrical and Mechanical Properties of Physically Vapor-Deposited Iridium and Rhodium Thin Films / Ilan Golecki, Margaret Eagan 105

Microstructural Evolution in Copper Films Undergoing Laser Pulsing at High Pressures / R. Jakkaraju, C.D. Dobson, A.L. Greer 111

The Influence of Thermal History and Alloying Elements on Temporary Strengthening of Thin Al-Cu Films / J.P. Lokker, G.C.A.M. Janssen, S. Radelaar 117

In Situ Study of Dislocation Behavior in Columnar Al Thin Film on Si Substrate During Thermal Cycling / Charles W. Allen, Herbert Schroeder, Jon M. Hiller 123

Diffusional Hillock Formation in Al Thin Films Controlled by Creep / Deok-kee Kim, William D. Nix, Eduard Arzt, Michael D. Deal, James D. Plummer 129

Mechanical Properties of Al Thin Films as Measured by Bulge Testing / Yinmin Wang, Richard L. Edwards, Kevin J. Hemker 135

Epitaxy, Deposition Parameters, Microstructure and Stresses

Silicide Induced Mechanical Stress in Si: What Are the Consequences for MOS Technology / Karen Maex, An Steegen 143

Excess Vacancy Generation by Silicide Formation in Si / R.J. Jaccodine 151

Sequential Operation of Three Distinct Misfit Dislocation Introduction Mechanisms in an Epitaxial Bilayer Film / V. Gopal, E.P. Kvam, E-H. Chen, J.M. Woodall 157

Stress Relaxation in Uniquely Oriented SiGe/Si Epitaxial Layers / M.E. Ware, R.J. Nemanich 163

Coherent and Incoherent Relaxation in III-V Heterostructures / Andre Rocher, Etienne Snoeck 169

Stress Effects in the Oxidation of Planar SiO[subscript 2] Thin Films / T.J. Delph, R.J. Jaccodine 175

Phase Formation and Mechanical Properties of Multiphase Carbide Coatings / J.E. Krzanowski, S.H. Koutzaki, J. Nainaparampil, J.S. Zabinski 181

Strain and Mosaic Structure in Si[subscript 0.7]Ge[subscript 0.3] Epilayers Grown on Si (001) Substrates Characterized by High Resolution X-ray Diffraction / J.H. Li, S.C. Moss 187

Thin Films for Applications in Mems (Joint Session)

Wafer Scale Testing of MEMS Structural Films / Brian J. Gally, C. Cameron Abnet, Stuart Brown, Clarence Chui 195

Fatigue of Thin Silver Investigated by Dynamic Microbeam Deflection / R. Schwaiger, O. Kraft 201

Bending Response of a 100 nm Thick Free Standing Aluminum Cantilever Beam / M. Taher A. Saif, Aman Haque 207

Film Stress Influence of Bilayer Metallization on the Structure of RF MEMS Switches / R.E. Strawser, R. Cortez, M.J. O'Keefe, K.D. Leedy, J.L. Ebel, H.T. Henderson 213

The Effect of Film Thickness on Stress and Transformation Behavior in Cobalt Thin Films / H. Th. Hesemann, P. Mullner, O. Kraft, E. Arzt 219

Mechanical Properties and Adhesion of PZT Thin Films for MEMS / J.M. Jungk, B.T. Crozier, A. Bandyopadhyay, N.R. Moody, D.F. Bahr 225

Residual Stresses in MEMS Structures / B.S. Majumdar, W.D. Cowan, N.J. Pagano 231

Stress and Stress Relaxation Study of Sputtered PZT Thin Films for Microsystems Applications / E. Defay, C. Malhaire, C. Dubois, D. Barbier 237

Polymer Thin Films

Nanoindentation Probing of Environmental Effects on Polymer Coating Properties / X. Xia, D. Rowenhorst, K.B. Yoder, L.E. Scriven, W.W. Gerberich 245

Viscoelastic Behavior of Polymer Films During Scratch Test: A Quantitative Analysis / Vincent D. Jardret, Warren C. Oliver 251

Mechanical Properties and Toughening of a Polymethylsilsesquioxane Network / Bizhong Zhu, Dimitris E. Katsoulis, Gregg A. Zank, Frederick J. McGarry 257

In Situ Characterization of Stress Development in Gelatin Film During Controlled Drying / Mengcheng Lu, Siu-Yue Tam, P. Randall Schunk, C. Jeffrey Brinker 263

Mechanical Properties of Amorphous and Crystalline Carbon (Joint Session)

Tribochemistry of ZDOL Decomposition on Carbon Overcoats in Ultra-High Vacuum (UHV) / C.S. Bhatia, C-Y. Chen, W. Fong, D.B. Bogy 271

Micro-Wear Scan Test on the Carbon Overcoats as Thin as 6 nm or Less / T.W. Wu, Thomas W. Scharf, Hong Zhang, John A. Barnard 283

Elastic Constants of Diamond-Like Carbon Films by Surface Brillouin Scattering / A.C. Ferrari, J. Robertson, R. Pastorelli, M.G. Beghi, C.E. Bottani 289

Tensile Properties of Amorphous Diamond Films / D.A. LaVan, R.J. Hohlfelder, J.P. Sullivan, T.A. Friedmann, M. Mitchell, C.I.H. Ashby 295

Computing Thin Film Mechanical Properties With the Oliver and Pharr Method / P.J. Wolff, B.N. Lucas, E.G. Herbert 301

Microcrystalline and Nanocrystalline Diamond Film Deposition on Cobalt Chrome Alloy / Marc D. Fries, Yogesh K. Vohra 307

Fabrication and Characterization of Functionally Gradient Diamond-Like Carbon Coatings / Q. Wei, A.K. Sharma, S. Yamolenko, J. Sankar, J. Narayan 313

Nanomechanical Properties of Amorphous Carbon and Carbon Nitride Thin Films Prepared by Shielded Arc Ion Plating / N. Tajima, S. Saze, H. Sugimura, O. Takai 319

Intrinsic Stress Measurements in CVD Diamond Films / Jin Yu, J.G. Kim, Y.C. Sohn, Y.S. Lee 325

Evaluation of Mechanical Properties of DLC-Tic Microlaminate Coatings / R. Bahl, M. Bedawyas, D. Patel, Ashok Kumar, M. Shamsuzzoha 331

Effects of Seeding Over the Microstructure and Stresses of Diamond Thin Films / S. Gupta, G. Morell, R.S. Katiyar, D.R. Gilbert, R.K. Singh 337

Micromechanical Analysis of Residual Stress Effect in CVD-Processed Diamond Wafer / J-H. Jeong, D. Kwon, J-K. Lee, W-S. Lee, Y-J. Baik 343

Adhesion and Fracture

A Brittle to Ductile Transition (BDT) in Adhered Thin Films / W.W. Gerberich, A.A. Volinsky, N.I. Tymiak, N.R. Moody 351

Modified Edge Lift-Off Test: Experimental Modifications for Multifilm Systems / J.C. Hay, E.G. Liniger, X-H. Liu 365

Micromechanics-Based Modeling of Interfacial Debonding in Multilayer Structures / P.A. Klein, H. Gao, A. Vainchtein, H. Fujimoto, J. Lee, Q. Ma 371

Analysis of Adhesion Strength of Interfaces Between Thin Films Using Molecular Dynamics Technique / T. Iwasaki, H. Miura 377

Superlayer Residual Stress Effect on the Indentation Adhesion Measurements / Alex A. Volinsky, Neville R. Moody, William W.

Gerberich 383

Measuring Thin Film Fracture Toughness Using the Indentation Sinking-in Effect and Focused Ion Beam / Ting Y. Tsui, Young-Chang Joo 389

On the Robustness of Scratch Testing for Thin Films: The Issue of Tip Geometry for Critical Load Measurement / Vincent D. Jardret, Warren C. Oliver 395

Mechanical Behavior of Indium Oxide Thin Films on Polymer Substrates / D.R. Cairns, S.M. Sachsman, D.K. Sparacin, R.P. Witte II, G.P. Crawford, D.C. Paine 401

Study of Crack Propagation at an Oxide/Polymer Interface Under Varying Loading Conditions / Dimitrios Pantelidis, Jeffrey Snodgrass, Reinhold H. Dauskardt, John C. Bravman 407

Reliability in Microelectronics

Adsorption/Desorption Phenomena in Silicate Glasses: Modeling and Application to a Sub-Micron Bicmos Technology / T. Hoffmann, V. Senez, P. Leduc 415

The Mechanical Properties of Common Interlevel Dielectric Films and Their Influences on Aluminum Interconnect Extrusions / Fen Chen, Baozhen Li, Timothy D. Sullivan, Clara L. Gonzalez, Christopher D. Muzzy, H.K. Lee, Mark D. Levy, Michael W. Dashiell|cJames Kolodzey 421

Stress, Microstructure and Temperature Stability of Reactive Sputter Deposited Ta(N) Thin Films / K.D. Leedy, M.J. O'Keefe, J.T. Grant 427

Mechanical Stress Measurements in Damascene-Fabricated Aluminum Interconnect Lines / Paul R. Besser 433

Passivated Interconnect Lines: Thermomechanical Analysis and Curvature Measurements / A. Wikstrom, P. Gudmundson, S. Suresh 439

Electromigration Modeling of Blech Experiment With Comparison to Recent Experimental Data / Zhineng Fan, M.A. Korhonen, C-Y. Li 445

Stress Effects on Al and Al(Cu) Thin Film Grain-Boundary Diffusion / X-Y. Liu, C-L. Liu 451

Room Temperature Deposition of Silicon Oxynitride Films With Low Stress Using Sputtering-Type Electron Cyclotron Resonance Plasmas / D. Gao, K. Furukawa, H. Nakashima, J. Gao, J. Wang, K. Muraoka 457

Stress Development in Low Dielectric Constant Silica Films During Drying and Heating Process / Mengcheng Lu, C. Jeffrey Brinker 463

Nanoindentation and Advanced Testing Techniques

Quantitative Study of Nanoscale Contact and Pre-Contact Mechanics Using Force Modulation / S.A. Syed Asif, K.J. Wahl, R.J. Colton 471

Microbridge Testing of Thin Films Under Small Deformation / T.Y. Zhang, Y.J. Su, C.F. Qian, M.H. Zhao, L.Q. Chen 477

Studies of Plasticity in Thin Al Films Using Picosecond Ultrasonics / G.A. Antonelli, H.J. Maris 483

Measurement of Local Strain in Thin Aluminum Interconnects Using Convergent Beam Electron Diffraction (CBED) / S. Kramer, J. Mayer 489

The Implications of Energetic and Kinetic Surface Instability for a Stress Measurement Technique / H.H. Yu, Z. Suo 495

The Strength and Fracture of Passive Oxide Films on Metals / M. Pang, D.E. Wilson, D.F. Bahr 501

Hardness and Elastic Modulus Measurements of AIN and TiN Sub-Micron Thin Films Using the Continuous Stiffness Measurement Technique With FEM Analysis / T.A. Rawdanowicz, J. Sankar, J. Narayan, V. Godbole 507

Plastic and Elastic Behavior of Sputtered Bilayered Films by Nanoindentation / N. Kikuchi, E. Kusano, Y. Sawahira, A. Kinbara 513

Measurement of Residual Stresses by Load and Depth Sensing Spherical Indentation / B. Taljat, G.M. Pharr 519

A Methodology for the Calibration of Spherical Indenters / J.G. Swadener, G.M. Pharr 525

Mechanical Characterization of Surfaces by Nanotribological Measurements of Sliding and Abrasive Terms / S. Enders, P. Grau, G. Berg 531.

Notes:

"This volume contains papers from Symposium V, 'Thin Films--Stresses and Mechancal Properties VIII,' held November 29-December 3 at the 1999 MRS Fall Meeting in Boston, Massachusetts"--Preface.

Includes bibliographic references and indexes.

Local Notes:

Acquired for the Penn Libraries with assistance from the Class of 1932 Fund.

ISBN:

1558995021

OCLC:

45161231