2 options
Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-14, 1982 / editors, H. Ryssel and H. Glawischnig.
Chemistry Library - Books TK7871.85 .I587 1982
Available
LIBRA TK7871.85 .I587 1982
Available from offsite location
- Format:
- Book
- Conference/Event
- Conference Name:
- Ion Implantation School (1982 : Berchtesgaden, Germany)
- International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)
- Series:
- Springer series in electrophysics ; v. 10.
- Springer series in electrophysics ; v. 10
- Language:
- English
- Subjects (All):
- Ion implantation.
- Semiconductor doping.
- Physical Description:
- xii, 372 pages : illustrations ; 24 cm.
- Place of Publication:
- Berlin ; New York : Springer-Verlag, 1982.
- Notes:
- Includes bibliographies and index.
- ISBN:
- 0387118780
- OCLC:
- 240883721
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.