Technical digest / IEEE International MEMS Conference.

Format:

• Conference/Event
• Journal/Periodical

Contributor:

• IEEE Robotics and Automation Society.

Conference Name:

• IEEE International Conference on Micro Electro Mechanical Systems.

Language:

English

Subjects (All):

• Microelectromechanical systems--Congresses.
• Microelectromechanical systems.
• Electromechanical devices--Congresses.
• Electromechanical devices.
• Microelectronics--Congresses.

Genre:

• Conference papers and proceedings.

Physical Description:

• 1 volume : illustrations ; 28 cm
• Annual
• 12th (1999).

Other Title:

• MEMS
• IEEE Micro Electro Mechanical Systems

Continues:

• IEEE Workshop on Micro Electro Mechanical Systems. Proceedings : IEEE micro electro mechanical systems

Continued By:

• IEEE International Conference on Micro Electro Mechanical Systems. Proceedings

Place of Publication:

[New York, N.Y.] : Institute of Electrical and Electronics Engineers, 1999.

Notes:

Sponsored by the IEEE Robotics and Automation Society.

OCLC:

187477098