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Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing / Takeshi Hattori (ed.).
LIBRA TK7871.85 .U48 1998
Available from offsite location
- Format:
- Book
- Language:
- English
- Subjects (All):
- Semiconductor wafers--Cleaning.
- Semiconductor wafers.
- Silicon--Surfaces.
- Silicon.
- Surface preparation.
- Physical Description:
- xxviii, 616 pages : illustrations ; 24 cm
- Place of Publication:
- Berlin ; New York : Springer, [1998]
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 3540616721
- OCLC:
- 38494601
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