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The Journal of vacuum science and technology.

LIBRA TJ940 .J67 v.1 (1964:Sept.)-v.2 (1965), v.5 (1968)-v.21 (1982)
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Format:
Journal/Periodical
Contributor:
American Institute of Physics.
American Vacuum Society.
Language:
English
Subjects (All):
Vacuum technology--Periodicals.
Vacuum technology.
Genre:
Periodicals.
Physical Description:
21 volumes : illustrations ; 28 cm
8 no. a year, 1982
Vol. 1, no. 1 (Sept./Oct. 1964)-v. 21, no. 4 (Nov./Dec. 1982).
Continued By:
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Place of Publication:
[New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]
Notes:
Title varies slightly.
Title from cover.
Official publication of the American Vacuum Society.
Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena.
Cited in:
Chemical abstracts 0009-2258
Other Format:
Online version: Journal of vacuum science and technology (Online)
ISSN:
0022-5355
OCLC:
1754855

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