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The Journal of vacuum science and technology.
LIBRA TJ940 .J67 v.1 (1964:Sept.)-v.2 (1965), v.5 (1968)-v.21 (1982)
Available from offsite location
- Format:
- Journal/Periodical
- Language:
- English
- Subjects (All):
- Vacuum technology--Periodicals.
- Vacuum technology.
- Genre:
- Periodicals.
- Physical Description:
- 21 volumes : illustrations ; 28 cm
- 8 no. a year, 1982
- Vol. 1, no. 1 (Sept./Oct. 1964)-v. 21, no. 4 (Nov./Dec. 1982).
- Continued By:
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films
- Journal of vacuum science & technology. B, Microelectronics processing and phenomena
- Place of Publication:
- [New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]
- Notes:
- Title varies slightly.
- Title from cover.
- Official publication of the American Vacuum Society.
- Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena.
- Cited in:
- Chemical abstracts 0009-2258
- Other Format:
- Online version: Journal of vacuum science and technology (Online)
- ISSN:
- 0022-5355
- OCLC:
- 1754855
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