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Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A. / Tomas Diaz de la Rubia ... [and others].
LIBRA TK7871.85 .D45453 1997
Available from offsite location
- Format:
- Book
- Series:
- Materials Research Society symposia proceedings ; v. 469.
- Materials Research Society symposia proceedings
- Language:
- English
- Subjects (All):
- Semiconductors--Defects--Congresses.
- Semiconductors.
- Semiconductors--Defects.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Silicon crystals--Defects--Congresses.
- Silicon crystals.
- Silicon crystals--Defects.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xv, 541 pages : illustrations ; 24 cm.
- Place of Publication:
- Pittsburg, Pa. : Materials Research Society, [1997]
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 1558993738
- OCLC:
- 37457922
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